7/29/2010	12:18:21 AM	Helium valve closed
7/29/2010	12:18:21 AM	BCl3 valve closed
7/29/2010	12:18:21 AM	PH3 valve closed
7/29/2010	12:18:21 AM	Main Vac valve closed
7/29/2010	12:18:21 AM	Bypass valve closed
7/29/2010	12:18:21 AM	H2 valve opened
7/29/2010	12:18:21 AM	SiCl4 pre valve opened
7/29/2010	12:18:21 AM	SiCl4 post valve opened
7/29/2010	12:18:21 AM	Bubbler valve opened
7/29/2010	12:18:21 AM	Helium MFC set to  0.000000
7/29/2010	12:18:21 AM	H2 MFC set to  500.000000
7/29/2010	12:18:21 AM	BCl3 MFC set to  0.000000
7/29/2010	12:18:21 AM	PHl3 MFC set to  0.000000
7/29/2010	12:18:21 AM	SiCl4 MFC set to  50.000000
7/29/2010	12:18:21 AM	Bypass solenoid MFC set to  0.000000
7/29/2010	12:18:21 AM	Tube furnace set to 1000
7/29/2010	12:33:21 AM	H2 valve closed
7/29/2010	12:33:21 AM	BCl3 valve closed
7/29/2010	12:33:21 AM	PH3 valve closed
7/29/2010	12:33:21 AM	SiCl4 pre valve closed
7/29/2010	12:33:21 AM	SiCl4 post valve closed
7/29/2010	12:33:21 AM	Main Vac valve closed
7/29/2010	12:33:21 AM	Bypass valve closed
7/29/2010	12:33:21 AM	Helium valve opened
7/29/2010	12:33:21 AM	Bubbler valve opened
7/29/2010	12:33:21 AM	Helium MFC set to  500.000000
7/29/2010	12:33:21 AM	H2 MFC set to  0.000000
7/29/2010	12:33:21 AM	BCl3 MFC set to  0.000000
7/29/2010	12:33:21 AM	PHl3 MFC set to  0.000000
7/29/2010	12:33:21 AM	SiCl4 MFC set to  0.000000
7/29/2010	12:33:21 AM	Bypass solenoid MFC set to  0.000000
7/29/2010	12:33:21 AM	Tube furnace set to 0
7/29/2010	1:06:41 AM	Helium valve closed
7/29/2010	1:06:41 AM	H2 valve closed
7/29/2010	1:06:41 AM	BCl3 valve closed
7/29/2010	1:06:41 AM	PH3 valve closed
7/29/2010	1:06:41 AM	SiCl4 pre valve closed
7/29/2010	1:06:41 AM	SiCl4 post valve closed
7/29/2010	1:06:41 AM	Main Vac valve closed
7/29/2010	1:06:41 AM	Bypass valve closed
7/29/2010	1:06:41 AM	Bubbler valve closed
7/29/2010	1:06:41 AM	Helium MFC set to  0.000000
7/29/2010	1:06:41 AM	H2 MFC set to  0.000000
7/29/2010	1:06:41 AM	BCl3 MFC set to  0.000000
7/29/2010	1:06:41 AM	PHl3 MFC set to  0.000000
7/29/2010	1:06:41 AM	SiCl4 MFC set to  0.000000
7/29/2010	1:06:41 AM	Bypass solenoid MFC set to  0.000000
7/29/2010	1:06:41 AM	Tube furnace set to 0
7/29/2010	1:06:42 AM	Run finished at 1:06 AM
7/29/2010	1:15:10 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/29/2010	1:15:11 AM	Recipe started at 1:15 AM
7/29/2010	1:15:11 AM	Helium valve closed
7/29/2010	1:15:11 AM	H2 valve closed
7/29/2010	1:15:11 AM	BCl3 valve closed
7/29/2010	1:15:11 AM	PH3 valve closed
7/29/2010	1:15:11 AM	SiCl4 pre valve closed
7/29/2010	1:15:11 AM	SiCl4 post valve closed
7/29/2010	1:15:11 AM	Main Vac valve closed
7/29/2010	1:15:11 AM	Bubbler valve closed
7/29/2010	1:15:11 AM	Bypass valve opened
7/29/2010	1:15:11 AM	Helium MFC set to  0.000000
7/29/2010	1:15:11 AM	H2 MFC set to  0.000000
7/29/2010	1:15:11 AM	BCl3 MFC set to  0.000000
7/29/2010	1:15:11 AM	PHl3 MFC set to  0.000000
7/29/2010	1:15:11 AM	SiCl4 MFC set to  0.000000
7/29/2010	1:15:11 AM	Bypass solenoid MFC set to  0.000000
7/29/2010	1:15:11 AM	Tube furnace set to 0
7/29/2010	1:15:47 AM	Helium valve closed
7/29/2010	1:15:47 AM	H2 valve closed
7/29/2010	1:15:47 AM	BCl3 valve closed
7/29/2010	1:15:47 AM	PH3 valve closed
7/29/2010	1:15:47 AM	SiCl4 pre valve closed
7/29/2010	1:15:47 AM	SiCl4 post valve closed
7/29/2010	1:15:47 AM	Bubbler valve closed
7/29/2010	1:15:47 AM	Main Vac valve opened
7/29/2010	1:15:47 AM	Bypass valve opened
7/29/2010	1:15:47 AM	Helium MFC set to  0.000000
7/29/2010	1:15:47 AM	H2 MFC set to  0.000000
7/29/2010	1:15:47 AM	BCl3 MFC set to  0.000000
7/29/2010	1:15:47 AM	PHl3 MFC set to  0.000000
7/29/2010	1:15:47 AM	SiCl4 MFC set to  0.000000
7/29/2010	1:15:47 AM	Bypass solenoid MFC set to  0.000000
7/29/2010	1:15:47 AM	Tube furnace set to 0
7/29/2010	1:15:47 AM	Run finished at 1:15 AM
7/29/2010	1:15:47 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/29/2010	11:45:29 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/29/2010	11:45:29 AM	Recipe started at 11:45 AM
7/29/2010	11:45:29 AM	H2 valve closed
7/29/2010	11:45:29 AM	BCl3 valve closed
7/29/2010	11:45:29 AM	PH3 valve closed
7/29/2010	11:45:29 AM	SiCl4 pre valve closed
7/29/2010	11:45:29 AM	SiCl4 post valve closed
7/29/2010	11:45:29 AM	Main Vac valve closed
7/29/2010	11:45:29 AM	Bypass valve closed
7/29/2010	11:45:29 AM	Bubbler valve closed
7/29/2010	11:45:29 AM	Helium valve opened
7/29/2010	11:45:29 AM	Helium MFC set to  500.000000
7/29/2010	11:45:29 AM	H2 MFC set to  0.000000
7/29/2010	11:45:29 AM	BCl3 MFC set to  0.000000
7/29/2010	11:45:29 AM	PHl3 MFC set to  0.000000
7/29/2010	11:45:29 AM	SiCl4 MFC set to  0.000000
7/29/2010	11:45:29 AM	Bypass solenoid MFC set to  0.000000
7/29/2010	11:45:30 AM	Tube furnace set to 0
7/29/2010	11:46:07 AM	Helium valve closed
7/29/2010	11:46:07 AM	H2 valve closed
7/29/2010	11:46:07 AM	BCl3 valve closed
7/29/2010	11:46:07 AM	PH3 valve closed
7/29/2010	11:46:07 AM	SiCl4 pre valve closed
7/29/2010	11:46:07 AM	SiCl4 post valve closed
7/29/2010	11:46:07 AM	Main Vac valve closed
7/29/2010	11:46:07 AM	Bypass valve closed
7/29/2010	11:46:07 AM	Bubbler valve closed
7/29/2010	11:46:07 AM	Helium MFC set to  0.000000
7/29/2010	11:46:07 AM	H2 MFC set to  0.000000
7/29/2010	11:46:07 AM	BCl3 MFC set to  0.000000
7/29/2010	11:46:07 AM	PHl3 MFC set to  0.000000
7/29/2010	11:46:07 AM	SiCl4 MFC set to  0.000000
7/29/2010	11:46:07 AM	Bypass solenoid MFC set to  0.000000
7/29/2010	11:46:07 AM	Tube furnace set to 0
7/29/2010	11:46:07 AM	Run finished at 11:46 AM
7/29/2010	11:46:07 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/29/2010	11:56:29 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
7/29/2010	11:56:32 AM	Recipe started at 11:56 AM
7/29/2010	11:56:32 AM	Helium valve closed
7/29/2010	11:56:32 AM	H2 valve closed
7/29/2010	11:56:32 AM	BCl3 valve closed
7/29/2010	11:56:32 AM	PH3 valve closed
7/29/2010	11:56:32 AM	SiCl4 pre valve closed
7/29/2010	11:56:32 AM	SiCl4 post valve closed
7/29/2010	11:56:32 AM	Main Vac valve closed
7/29/2010	11:56:32 AM	Bubbler valve closed
7/29/2010	11:56:32 AM	Bypass valve opened
7/29/2010	11:56:32 AM	Helium MFC set to  0.000000
7/29/2010	11:56:32 AM	H2 MFC set to  0.000000
7/29/2010	11:56:32 AM	BCl3 MFC set to  0.000000
7/29/2010	11:56:32 AM	PHl3 MFC set to  0.000000
7/29/2010	11:56:32 AM	SiCl4 MFC set to  0.000000
7/29/2010	11:56:32 AM	Bypass solenoid MFC set to  0.000000
7/29/2010	11:56:32 AM	Tube furnace set to 0
7/29/2010	11:57:12 AM	Helium valve closed
7/29/2010	11:57:12 AM	H2 valve closed
7/29/2010	11:57:12 AM	BCl3 valve closed
7/29/2010	11:57:12 AM	PH3 valve closed
7/29/2010	11:57:12 AM	SiCl4 pre valve closed
7/29/2010	11:57:12 AM	SiCl4 post valve closed
7/29/2010	11:57:12 AM	Bubbler valve closed
7/29/2010	11:57:12 AM	Main Vac valve opened
7/29/2010	11:57:12 AM	Bypass valve opened
7/29/2010	11:57:12 AM	Helium MFC set to  0.000000
7/29/2010	11:57:12 AM	H2 MFC set to  0.000000
7/29/2010	11:57:12 AM	BCl3 MFC set to  0.000000
7/29/2010	11:57:12 AM	PHl3 MFC set to  0.000000
7/29/2010	11:57:12 AM	SiCl4 MFC set to  0.000000
7/29/2010	11:57:12 AM	Bypass solenoid MFC set to  0.000000
7/29/2010	11:57:12 AM	Tube furnace set to 0
7/29/2010	11:58:12 AM	H2 valve closed
7/29/2010	11:58:12 AM	BCl3 valve closed
7/29/2010	11:58:12 AM	PH3 valve closed
7/29/2010	11:58:12 AM	SiCl4 pre valve closed
7/29/2010	11:58:12 AM	SiCl4 post valve closed
7/29/2010	11:58:12 AM	Bubbler valve closed
7/29/2010	11:58:12 AM	Helium valve opened
7/29/2010	11:58:12 AM	Main Vac valve opened
7/29/2010	11:58:12 AM	Bypass valve opened
7/29/2010	11:58:12 AM	Helium MFC set to  100.000000
7/29/2010	11:58:12 AM	H2 MFC set to  0.000000
7/29/2010	11:58:12 AM	BCl3 MFC set to  0.000000
7/29/2010	11:58:12 AM	PHl3 MFC set to  0.000000
7/29/2010	11:58:12 AM	SiCl4 MFC set to  0.000000
7/29/2010	11:58:12 AM	Bypass solenoid MFC set to  0.000000
7/29/2010	11:58:12 AM	Tube furnace set to 0
7/29/2010	12:07:12 PM	Helium valve closed
7/29/2010	12:07:12 PM	H2 valve closed
7/29/2010	12:07:12 PM	BCl3 valve closed
7/29/2010	12:07:12 PM	PH3 valve closed
7/29/2010	12:07:12 PM	SiCl4 pre valve closed
7/29/2010	12:07:12 PM	SiCl4 post valve closed
7/29/2010	12:07:12 PM	Bubbler valve closed
7/29/2010	12:07:12 PM	Main Vac valve opened
7/29/2010	12:07:12 PM	Bypass valve opened
7/29/2010	12:07:12 PM	Helium MFC set to  0.000000
7/29/2010	12:07:12 PM	H2 MFC set to  0.000000
7/29/2010	12:07:12 PM	BCl3 MFC set to  0.000000
7/29/2010	12:07:12 PM	PHl3 MFC set to  0.000000
7/29/2010	12:07:12 PM	SiCl4 MFC set to  0.000000
7/29/2010	12:07:12 PM	Bypass solenoid MFC set to  0.000000
7/29/2010	12:07:12 PM	Tube furnace set to 0
7/29/2010	12:08:12 PM	H2 valve closed
7/29/2010	12:08:12 PM	BCl3 valve closed
7/29/2010	12:08:12 PM	PH3 valve closed
7/29/2010	12:08:12 PM	SiCl4 pre valve closed
7/29/2010	12:08:12 PM	SiCl4 post valve closed
7/29/2010	12:08:12 PM	Bubbler valve closed
7/29/2010	12:08:12 PM	Helium valve opened
7/29/2010	12:08:12 PM	Main Vac valve opened
7/29/2010	12:08:12 PM	Bypass valve opened
7/29/2010	12:08:12 PM	Helium MFC set to  100.000000
7/29/2010	12:08:12 PM	H2 MFC set to  0.000000
7/29/2010	12:08:12 PM	BCl3 MFC set to  0.000000
7/29/2010	12:08:12 PM	PHl3 MFC set to  0.000000
7/29/2010	12:08:12 PM	SiCl4 MFC set to  0.000000
7/29/2010	12:08:12 PM	Bypass solenoid MFC set to  0.000000
7/29/2010	12:08:12 PM	Tube furnace set to 0
7/29/2010	12:17:12 PM	Helium valve closed
7/29/2010	12:17:12 PM	H2 valve closed
7/29/2010	12:17:12 PM	BCl3 valve closed
7/29/2010	12:17:12 PM	PH3 valve closed
7/29/2010	12:17:12 PM	SiCl4 pre valve closed
7/29/2010	12:17:12 PM	SiCl4 post valve closed
7/29/2010	12:17:12 PM	Bubbler valve closed
7/29/2010	12:17:12 PM	Main Vac valve opened
7/29/2010	12:17:12 PM	Bypass valve opened
7/29/2010	12:17:12 PM	Helium MFC set to  0.000000
7/29/2010	12:17:12 PM	H2 MFC set to  0.000000
7/29/2010	12:17:12 PM	BCl3 MFC set to  0.000000
7/29/2010	12:17:12 PM	PHl3 MFC set to  0.000000
7/29/2010	12:17:12 PM	SiCl4 MFC set to  0.000000
7/29/2010	12:17:12 PM	Bypass solenoid MFC set to  0.000000
7/29/2010	12:17:13 PM	Tube furnace set to 0
7/29/2010	12:18:13 PM	H2 valve closed
7/29/2010	12:18:13 PM	BCl3 valve closed
7/29/2010	12:18:13 PM	PH3 valve closed
7/29/2010	12:18:13 PM	SiCl4 pre valve closed
7/29/2010	12:18:13 PM	SiCl4 post valve closed
7/29/2010	12:18:13 PM	Bubbler valve closed
7/29/2010	12:18:13 PM	Helium valve opened
7/29/2010	12:18:13 PM	Main Vac valve opened
7/29/2010	12:18:13 PM	Bypass valve opened
7/29/2010	12:18:13 PM	Helium MFC set to  100.000000
7/29/2010	12:18:13 PM	H2 MFC set to  0.000000
7/29/2010	12:18:13 PM	BCl3 MFC set to  0.000000
7/29/2010	12:18:13 PM	PHl3 MFC set to  0.000000
7/29/2010	12:18:13 PM	SiCl4 MFC set to  0.000000
7/29/2010	12:18:13 PM	Bypass solenoid MFC set to  0.000000
7/29/2010	12:18:13 PM	Tube furnace set to 0
7/29/2010	12:27:13 PM	Helium valve closed
7/29/2010	12:27:13 PM	H2 valve closed
7/29/2010	12:27:13 PM	BCl3 valve closed
7/29/2010	12:27:13 PM	PH3 valve closed
7/29/2010	12:27:13 PM	SiCl4 pre valve closed
7/29/2010	12:27:13 PM	SiCl4 post valve closed
7/29/2010	12:27:13 PM	Bubbler valve closed
7/29/2010	12:27:13 PM	Main Vac valve opened
7/29/2010	12:27:13 PM	Bypass valve opened
7/29/2010	12:27:13 PM	Helium MFC set to  0.000000
7/29/2010	12:27:13 PM	H2 MFC set to  0.000000
7/29/2010	12:27:13 PM	BCl3 MFC set to  0.000000
7/29/2010	12:27:13 PM	PHl3 MFC set to  0.000000
7/29/2010	12:27:13 PM	SiCl4 MFC set to  0.000000
7/29/2010	12:27:13 PM	Bypass solenoid MFC set to  0.000000
7/29/2010	12:27:13 PM	Tube furnace set to 0
7/29/2010	12:27:14 PM	Run finished at 12:27 PM
7/29/2010	12:27:14 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
7/29/2010	12:28:45 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/29/2010	12:28:45 PM	Recipe started at 12:28 PM
7/29/2010	12:28:45 PM	Helium valve closed
7/29/2010	12:28:45 PM	H2 valve closed
7/29/2010	12:28:45 PM	BCl3 valve closed
7/29/2010	12:28:45 PM	PH3 valve closed
7/29/2010	12:28:45 PM	SiCl4 pre valve closed
7/29/2010	12:28:45 PM	SiCl4 post valve closed
7/29/2010	12:28:45 PM	Main Vac valve closed
7/29/2010	12:28:45 PM	Bubbler valve closed
7/29/2010	12:28:45 PM	Bypass valve opened
7/29/2010	12:28:45 PM	Helium MFC set to  0.000000
7/29/2010	12:28:45 PM	H2 MFC set to  0.000000
7/29/2010	12:28:45 PM	BCl3 MFC set to  0.000000
7/29/2010	12:28:45 PM	PHl3 MFC set to  0.000000
7/29/2010	12:28:46 PM	SiCl4 MFC set to  0.000000
7/29/2010	12:28:46 PM	Bypass solenoid MFC set to  0.000000
7/29/2010	12:28:46 PM	Tube furnace set to 0
7/29/2010	12:28:46 PM	Helium valve closed
7/29/2010	12:28:46 PM	H2 valve closed
7/29/2010	12:28:46 PM	BCl3 valve closed
7/29/2010	12:28:46 PM	PH3 valve closed
7/29/2010	12:28:46 PM	SiCl4 pre valve closed
7/29/2010	12:28:46 PM	SiCl4 post valve closed
7/29/2010	12:28:46 PM	Bubbler valve closed
7/29/2010	12:28:46 PM	Main Vac valve opened
7/29/2010	12:28:46 PM	Bypass valve opened
7/29/2010	12:28:46 PM	Helium MFC set to  0.000000
7/29/2010	12:28:46 PM	H2 MFC set to  0.000000
7/29/2010	12:28:46 PM	BCl3 MFC set to  0.000000
7/29/2010	12:28:46 PM	PHl3 MFC set to  0.000000
7/29/2010	12:28:46 PM	SiCl4 MFC set to  0.000000
7/29/2010	12:28:46 PM	Bypass solenoid MFC set to  0.000000
7/29/2010	12:28:46 PM	Tube furnace set to 0
7/29/2010	12:28:46 PM	Run finished at 12:28 PM
7/29/2010	12:28:46 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/29/2010	3:14:35 PM	Recipe started at 3:14 PM
7/29/2010	3:14:35 PM	Helium valve closed
7/29/2010	3:14:35 PM	BCl3 valve closed
7/29/2010	3:14:35 PM	PH3 valve closed
7/29/2010	3:14:35 PM	SiCl4 pre valve closed
7/29/2010	3:14:35 PM	SiCl4 post valve closed
7/29/2010	3:14:35 PM	Main Vac valve closed
7/29/2010	3:14:35 PM	Bypass valve closed
7/29/2010	3:14:35 PM	Bubbler valve closed
7/29/2010	3:14:35 PM	H2 valve opened
7/29/2010	3:14:35 PM	Helium MFC set to  0.000000
7/29/2010	3:14:35 PM	H2 MFC set to  500.000000
7/29/2010	3:14:35 PM	BCl3 MFC set to  0.000000
7/29/2010	3:14:35 PM	PHl3 MFC set to  0.000000
7/29/2010	3:14:35 PM	SiCl4 MFC set to  0.000000
7/29/2010	3:14:35 PM	Bypass solenoid MFC set to  0.000000
7/29/2010	3:14:35 PM	Tube furnace set to 1000
7/29/2010	3:15:59 PM	Helium valve closed
7/29/2010	3:15:59 PM	BCl3 valve closed
7/29/2010	3:15:59 PM	PH3 valve closed
7/29/2010	3:15:59 PM	SiCl4 pre valve closed
7/29/2010	3:15:59 PM	SiCl4 post valve closed
7/29/2010	3:15:59 PM	Main Vac valve closed
7/29/2010	3:15:59 PM	Bypass valve closed
7/29/2010	3:15:59 PM	H2 valve opened
7/29/2010	3:15:59 PM	Bubbler valve opened
7/29/2010	3:15:59 PM	Helium MFC set to  0.000000
7/29/2010	3:15:59 PM	H2 MFC set to  500.000000
7/29/2010	3:15:59 PM	BCl3 MFC set to  0.000000
7/29/2010	3:15:59 PM	PHl3 MFC set to  0.000000
7/29/2010	3:15:59 PM	SiCl4 MFC set to  0.000000
7/29/2010	3:15:59 PM	Bypass solenoid MFC set to  0.000000
7/29/2010	3:15:59 PM	Tube furnace set to 1000
7/29/2010	3:35:59 PM	Helium valve closed
7/29/2010	3:35:59 PM	PH3 valve closed
7/29/2010	3:35:59 PM	Main Vac valve closed
7/29/2010	3:35:59 PM	Bypass valve closed
7/29/2010	3:35:59 PM	H2 valve opened
7/29/2010	3:35:59 PM	BCl3 valve opened
7/29/2010	3:35:59 PM	SiCl4 pre valve opened
7/29/2010	3:35:59 PM	SiCl4 post valve opened
7/29/2010	3:35:59 PM	Bubbler valve opened
7/29/2010	3:35:59 PM	Helium MFC set to  0.000000
7/29/2010	3:35:59 PM	H2 MFC set to  500.000000
7/29/2010	3:35:59 PM	BCl3 MFC set to  35.000000
7/29/2010	3:35:59 PM	PHl3 MFC set to  0.000000
7/29/2010	3:35:59 PM	SiCl4 MFC set to  50.000000
7/29/2010	3:35:59 PM	Bypass solenoid MFC set to  0.000000
7/29/2010	3:35:59 PM	Tube furnace set to 1000
7/29/2010	3:37:15 PM	Run aborted at 3:37 PM
7/29/2010	3:37:15 PM	Helium valve closed
7/29/2010	3:37:15 PM	H2 valve closed
7/29/2010	3:37:15 PM	BCl3 valve closed
7/29/2010	3:37:15 PM	PH3 valve closed
7/29/2010	3:37:15 PM	SiCl4 pre valve closed
7/29/2010	3:37:15 PM	SiCl4 post valve closed
7/29/2010	3:37:15 PM	Bypass valve closed
7/29/2010	3:37:15 PM	Main Vac valve closed
7/29/2010	3:37:15 PM	Bubbler valve closed
7/29/2010	3:37:15 PM	Helium MFC set to  0.000000
7/29/2010	3:37:15 PM	H2 MFC set to  0.000000
7/29/2010	3:37:15 PM	BCl3 MFC set to  0.000000
7/29/2010	3:37:15 PM	PHl3 MFC set to  0.000000
7/29/2010	3:37:15 PM	SiCl4 MFC set to  0.000000
7/29/2010	3:37:15 PM	Tube furnace set to 0
7/29/2010	3:37:48 PM	Tube furnace set to 100
7/29/2010	3:37:53 PM	Tube furnace set to 1000
7/29/2010	3:37:56 PM	Tube furnace set to 0
7/29/2010	3:38:16 PM	Tube furnace set to 1000
7/29/2010	3:39:00 PM	Recipe started at 3:39 PM
7/29/2010	3:39:01 PM	Helium valve closed
7/29/2010	3:39:01 PM	BCl3 valve closed
7/29/2010	3:39:01 PM	PH3 valve closed
7/29/2010	3:39:01 PM	SiCl4 pre valve closed
7/29/2010	3:39:01 PM	SiCl4 post valve closed
7/29/2010	3:39:01 PM	Main Vac valve closed
7/29/2010	3:39:01 PM	Bypass valve closed
7/29/2010	3:39:01 PM	Bubbler valve closed
7/29/2010	3:39:01 PM	H2 valve opened
7/29/2010	3:39:01 PM	Helium MFC set to  0.000000
7/29/2010	3:39:01 PM	H2 MFC set to  500.000000
7/29/2010	3:39:01 PM	BCl3 MFC set to  0.000000
7/29/2010	3:39:01 PM	PHl3 MFC set to  0.000000
7/29/2010	3:39:01 PM	SiCl4 MFC set to  0.000000
7/29/2010	3:39:01 PM	Bypass solenoid MFC set to  0.000000
7/29/2010	3:39:01 PM	Tube furnace set to 1000
7/29/2010	3:39:04 PM	Helium valve closed
7/29/2010	3:39:04 PM	BCl3 valve closed
7/29/2010	3:39:04 PM	PH3 valve closed
7/29/2010	3:39:04 PM	SiCl4 pre valve closed
7/29/2010	3:39:04 PM	SiCl4 post valve closed
7/29/2010	3:39:04 PM	Main Vac valve closed
7/29/2010	3:39:04 PM	Bypass valve closed
7/29/2010	3:39:04 PM	H2 valve opened
7/29/2010	3:39:04 PM	Bubbler valve opened
7/29/2010	3:39:04 PM	Helium MFC set to  0.000000
7/29/2010	3:39:04 PM	H2 MFC set to  500.000000
7/29/2010	3:39:04 PM	BCl3 MFC set to  0.000000
7/29/2010	3:39:04 PM	PHl3 MFC set to  0.000000
7/29/2010	3:39:04 PM	SiCl4 MFC set to  0.000000
7/29/2010	3:39:04 PM	Bypass solenoid MFC set to  0.000000
7/29/2010	3:39:04 PM	Tube furnace set to 1000
7/29/2010	3:59:04 PM	Helium valve closed
7/29/2010	3:59:04 PM	PH3 valve closed
7/29/2010	3:59:04 PM	Main Vac valve closed
7/29/2010	3:59:04 PM	Bypass valve closed
7/29/2010	3:59:04 PM	H2 valve opened
7/29/2010	3:59:04 PM	BCl3 valve opened
7/29/2010	3:59:04 PM	SiCl4 pre valve opened
7/29/2010	3:59:04 PM	SiCl4 post valve opened
7/29/2010	3:59:04 PM	Bubbler valve opened
7/29/2010	3:59:04 PM	Helium MFC set to  0.000000
7/29/2010	3:59:04 PM	H2 MFC set to  500.000000
7/29/2010	3:59:04 PM	BCl3 MFC set to  35.000000
7/29/2010	3:59:04 PM	PHl3 MFC set to  0.000000
7/29/2010	3:59:04 PM	SiCl4 MFC set to  50.000000
7/29/2010	3:59:04 PM	Bypass solenoid MFC set to  0.000000
7/29/2010	3:59:04 PM	Tube furnace set to 1000
7/29/2010	4:04:04 PM	Helium valve closed
7/29/2010	4:04:04 PM	BCl3 valve closed
7/29/2010	4:04:04 PM	PH3 valve closed
7/29/2010	4:04:04 PM	SiCl4 pre valve closed
7/29/2010	4:04:04 PM	SiCl4 post valve closed
7/29/2010	4:04:04 PM	Main Vac valve closed
7/29/2010	4:04:04 PM	Bypass valve closed
7/29/2010	4:04:04 PM	H2 valve opened
7/29/2010	4:04:04 PM	Bubbler valve opened
7/29/2010	4:04:04 PM	Helium MFC set to  0.000000
7/29/2010	4:04:04 PM	H2 MFC set to  500.000000
7/29/2010	4:04:04 PM	BCl3 MFC set to  0.000000
7/29/2010	4:04:04 PM	PHl3 MFC set to  0.000000
7/29/2010	4:04:04 PM	SiCl4 MFC set to  0.000000
7/29/2010	4:04:04 PM	Bypass solenoid MFC set to  0.000000
7/29/2010	4:04:04 PM	Tube furnace set to 750
7/29/2010	4:24:04 PM	H2 valve closed
7/29/2010	4:24:04 PM	BCl3 valve closed
7/29/2010	4:24:04 PM	PH3 valve closed
7/29/2010	4:24:04 PM	SiCl4 pre valve closed
7/29/2010	4:24:04 PM	SiCl4 post valve closed
7/29/2010	4:24:04 PM	Main Vac valve closed
7/29/2010	4:24:04 PM	Bypass valve closed
7/29/2010	4:24:04 PM	Helium valve opened
7/29/2010	4:24:04 PM	Bubbler valve opened
7/29/2010	4:24:04 PM	Helium MFC set to  500.000000
7/29/2010	4:24:04 PM	H2 MFC set to  0.000000
7/29/2010	4:24:04 PM	BCl3 MFC set to  0.000000
7/29/2010	4:24:04 PM	PHl3 MFC set to  0.000000
7/29/2010	4:24:04 PM	SiCl4 MFC set to  0.000000
7/29/2010	4:24:04 PM	Bypass solenoid MFC set to  0.000000
7/29/2010	4:24:04 PM	Tube furnace set to 0
7/29/2010	4:44:04 PM	Helium valve closed
7/29/2010	4:44:04 PM	H2 valve closed
7/29/2010	4:44:04 PM	BCl3 valve closed
7/29/2010	4:44:04 PM	PH3 valve closed
7/29/2010	4:44:04 PM	SiCl4 pre valve closed
7/29/2010	4:44:04 PM	SiCl4 post valve closed
7/29/2010	4:44:04 PM	Main Vac valve closed
7/29/2010	4:44:04 PM	Bypass valve closed
7/29/2010	4:44:04 PM	Bubbler valve closed
7/29/2010	4:44:04 PM	Helium MFC set to  0.000000
7/29/2010	4:44:04 PM	H2 MFC set to  0.000000
7/29/2010	4:44:04 PM	BCl3 MFC set to  0.000000
7/29/2010	4:44:04 PM	PHl3 MFC set to  0.000000
7/29/2010	4:44:04 PM	SiCl4 MFC set to  0.000000
7/29/2010	4:44:04 PM	Bypass solenoid MFC set to  0.000000
7/29/2010	4:44:05 PM	Tube furnace set to 0
7/29/2010	4:44:05 PM	Run finished at 4:44 PM
7/29/2010	5:03:35 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
7/29/2010	5:03:38 PM	Recipe started at 5:03 PM
7/29/2010	5:03:38 PM	Helium valve closed
7/29/2010	5:03:38 PM	H2 valve closed
7/29/2010	5:03:38 PM	BCl3 valve closed
7/29/2010	5:03:38 PM	PH3 valve closed
7/29/2010	5:03:38 PM	SiCl4 pre valve closed
7/29/2010	5:03:38 PM	SiCl4 post valve closed
7/29/2010	5:03:38 PM	Main Vac valve closed
7/29/2010	5:03:38 PM	Bubbler valve closed
7/29/2010	5:03:38 PM	Bypass valve opened
7/29/2010	5:03:38 PM	Helium MFC set to  0.000000
7/29/2010	5:03:38 PM	H2 MFC set to  0.000000
7/29/2010	5:03:38 PM	BCl3 MFC set to  0.000000
7/29/2010	5:03:38 PM	PHl3 MFC set to  0.000000
7/29/2010	5:03:38 PM	SiCl4 MFC set to  0.000000
7/29/2010	5:03:38 PM	Bypass solenoid MFC set to  0.000000
7/29/2010	5:03:38 PM	Tube furnace set to 0
7/29/2010	5:04:37 PM	Helium valve closed
7/29/2010	5:04:37 PM	H2 valve closed
7/29/2010	5:04:37 PM	BCl3 valve closed
7/29/2010	5:04:37 PM	PH3 valve closed
7/29/2010	5:04:37 PM	SiCl4 pre valve closed
7/29/2010	5:04:37 PM	SiCl4 post valve closed
7/29/2010	5:04:37 PM	Bubbler valve closed
7/29/2010	5:04:37 PM	Main Vac valve opened
7/29/2010	5:04:37 PM	Bypass valve opened
7/29/2010	5:04:37 PM	Helium MFC set to  0.000000
7/29/2010	5:04:37 PM	H2 MFC set to  0.000000
7/29/2010	5:04:37 PM	BCl3 MFC set to  0.000000
7/29/2010	5:04:37 PM	PHl3 MFC set to  0.000000
7/29/2010	5:04:37 PM	SiCl4 MFC set to  0.000000
7/29/2010	5:04:37 PM	Bypass solenoid MFC set to  0.000000
7/29/2010	5:04:37 PM	Tube furnace set to 0
7/29/2010	5:05:37 PM	H2 valve closed
7/29/2010	5:05:37 PM	BCl3 valve closed
7/29/2010	5:05:37 PM	PH3 valve closed
7/29/2010	5:05:37 PM	SiCl4 pre valve closed
7/29/2010	5:05:37 PM	SiCl4 post valve closed
7/29/2010	5:05:37 PM	Bubbler valve closed
7/29/2010	5:05:37 PM	Helium valve opened
7/29/2010	5:05:37 PM	Main Vac valve opened
7/29/2010	5:05:37 PM	Bypass valve opened
7/29/2010	5:05:37 PM	Helium MFC set to  100.000000
7/29/2010	5:05:37 PM	H2 MFC set to  0.000000
7/29/2010	5:05:37 PM	BCl3 MFC set to  0.000000
7/29/2010	5:05:37 PM	PHl3 MFC set to  0.000000
7/29/2010	5:05:37 PM	SiCl4 MFC set to  0.000000
7/29/2010	5:05:37 PM	Bypass solenoid MFC set to  0.000000
7/29/2010	5:05:37 PM	Tube furnace set to 0
7/29/2010	5:14:37 PM	Helium valve closed
7/29/2010	5:14:37 PM	H2 valve closed
7/29/2010	5:14:37 PM	BCl3 valve closed
7/29/2010	5:14:37 PM	PH3 valve closed
7/29/2010	5:14:37 PM	SiCl4 pre valve closed
7/29/2010	5:14:37 PM	SiCl4 post valve closed
7/29/2010	5:14:37 PM	Bubbler valve closed
7/29/2010	5:14:37 PM	Main Vac valve opened
7/29/2010	5:14:37 PM	Bypass valve opened
7/29/2010	5:14:37 PM	Helium MFC set to  0.000000
7/29/2010	5:14:37 PM	H2 MFC set to  0.000000
7/29/2010	5:14:37 PM	BCl3 MFC set to  0.000000
7/29/2010	5:14:37 PM	PHl3 MFC set to  0.000000
7/29/2010	5:14:37 PM	SiCl4 MFC set to  0.000000
7/29/2010	5:14:37 PM	Bypass solenoid MFC set to  0.000000
7/29/2010	5:14:37 PM	Tube furnace set to 0
7/29/2010	5:15:37 PM	H2 valve closed
7/29/2010	5:15:37 PM	BCl3 valve closed
7/29/2010	5:15:37 PM	PH3 valve closed
7/29/2010	5:15:37 PM	SiCl4 pre valve closed
7/29/2010	5:15:37 PM	SiCl4 post valve closed
7/29/2010	5:15:37 PM	Bubbler valve closed
7/29/2010	5:15:37 PM	Helium valve opened
7/29/2010	5:15:38 PM	Main Vac valve opened
7/29/2010	5:15:38 PM	Bypass valve opened
7/29/2010	5:15:38 PM	Helium MFC set to  100.000000
7/29/2010	5:15:38 PM	H2 MFC set to  0.000000
7/29/2010	5:15:38 PM	BCl3 MFC set to  0.000000
7/29/2010	5:15:38 PM	PHl3 MFC set to  0.000000
7/29/2010	5:15:38 PM	SiCl4 MFC set to  0.000000
7/29/2010	5:15:38 PM	Bypass solenoid MFC set to  0.000000
7/29/2010	5:15:38 PM	Tube furnace set to 0
7/29/2010	5:24:38 PM	Helium valve closed
7/29/2010	5:24:38 PM	H2 valve closed
7/29/2010	5:24:38 PM	BCl3 valve closed
7/29/2010	5:24:38 PM	PH3 valve closed
7/29/2010	5:24:38 PM	SiCl4 pre valve closed
7/29/2010	5:24:38 PM	SiCl4 post valve closed
7/29/2010	5:24:38 PM	Bubbler valve closed
7/29/2010	5:24:38 PM	Main Vac valve opened
7/29/2010	5:24:38 PM	Bypass valve opened
7/29/2010	5:24:38 PM	Helium MFC set to  0.000000
7/29/2010	5:24:38 PM	H2 MFC set to  0.000000
7/29/2010	5:24:38 PM	BCl3 MFC set to  0.000000
7/29/2010	5:24:38 PM	PHl3 MFC set to  0.000000
7/29/2010	5:24:38 PM	SiCl4 MFC set to  0.000000
7/29/2010	5:24:38 PM	Bypass solenoid MFC set to  0.000000
7/29/2010	5:24:38 PM	Tube furnace set to 0
7/29/2010	5:25:38 PM	H2 valve closed
7/29/2010	5:25:38 PM	BCl3 valve closed
7/29/2010	5:25:38 PM	PH3 valve closed
7/29/2010	5:25:38 PM	SiCl4 pre valve closed
7/29/2010	5:25:38 PM	SiCl4 post valve closed
7/29/2010	5:25:38 PM	Bubbler valve closed
7/29/2010	5:25:38 PM	Helium valve opened
7/29/2010	5:25:38 PM	Main Vac valve opened
7/29/2010	5:25:38 PM	Bypass valve opened
7/29/2010	5:25:38 PM	Helium MFC set to  100.000000
7/29/2010	5:25:38 PM	H2 MFC set to  0.000000
7/29/2010	5:25:38 PM	BCl3 MFC set to  0.000000
7/29/2010	5:25:38 PM	PHl3 MFC set to  0.000000
7/29/2010	5:25:38 PM	SiCl4 MFC set to  0.000000
7/29/2010	5:25:38 PM	Bypass solenoid MFC set to  0.000000
7/29/2010	5:25:38 PM	Tube furnace set to 0
7/29/2010	5:34:38 PM	Helium valve closed
7/29/2010	5:34:38 PM	H2 valve closed
7/29/2010	5:34:38 PM	BCl3 valve closed
7/29/2010	5:34:38 PM	PH3 valve closed
7/29/2010	5:34:38 PM	SiCl4 pre valve closed
7/29/2010	5:34:38 PM	SiCl4 post valve closed
7/29/2010	5:34:38 PM	Bubbler valve closed
7/29/2010	5:34:38 PM	Main Vac valve opened
7/29/2010	5:34:38 PM	Bypass valve opened
7/29/2010	5:34:38 PM	Helium MFC set to  0.000000
7/29/2010	5:34:38 PM	H2 MFC set to  0.000000
7/29/2010	5:34:38 PM	BCl3 MFC set to  0.000000
7/29/2010	5:34:38 PM	PHl3 MFC set to  0.000000
7/29/2010	5:34:38 PM	SiCl4 MFC set to  0.000000
7/29/2010	5:34:38 PM	Bypass solenoid MFC set to  0.000000
7/29/2010	5:34:38 PM	Tube furnace set to 0
7/29/2010	5:34:39 PM	Run finished at 5:34 PM
7/29/2010	5:34:39 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
7/29/2010	5:44:04 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
7/29/2010	5:44:07 PM	Recipe started at 5:44 PM
7/29/2010	5:44:07 PM	Helium valve closed
7/29/2010	5:44:07 PM	H2 valve closed
7/29/2010	5:44:07 PM	BCl3 valve closed
7/29/2010	5:44:07 PM	PH3 valve closed
7/29/2010	5:44:07 PM	SiCl4 pre valve closed
7/29/2010	5:44:07 PM	SiCl4 post valve closed
7/29/2010	5:44:07 PM	Main Vac valve closed
7/29/2010	5:44:07 PM	Bubbler valve closed
7/29/2010	5:44:07 PM	Bypass valve opened
7/29/2010	5:44:07 PM	Helium MFC set to  0.000000
7/29/2010	5:44:07 PM	H2 MFC set to  0.000000
7/29/2010	5:44:07 PM	BCl3 MFC set to  0.000000
7/29/2010	5:44:07 PM	PHl3 MFC set to  0.000000
7/29/2010	5:44:07 PM	SiCl4 MFC set to  0.000000
7/29/2010	5:44:07 PM	Bypass solenoid MFC set to  0.000000
7/29/2010	5:44:08 PM	Tube furnace set to 0
7/29/2010	5:44:08 PM	Helium valve closed
7/29/2010	5:44:08 PM	H2 valve closed
7/29/2010	5:44:08 PM	BCl3 valve closed
7/29/2010	5:44:08 PM	PH3 valve closed
7/29/2010	5:44:08 PM	SiCl4 pre valve closed
7/29/2010	5:44:08 PM	SiCl4 post valve closed
7/29/2010	5:44:08 PM	Bubbler valve closed
7/29/2010	5:44:08 PM	Main Vac valve opened
7/29/2010	5:44:08 PM	Bypass valve opened
7/29/2010	5:44:08 PM	Helium MFC set to  0.000000
7/29/2010	5:44:08 PM	H2 MFC set to  0.000000
7/29/2010	5:44:08 PM	BCl3 MFC set to  0.000000
7/29/2010	5:44:08 PM	PHl3 MFC set to  0.000000
7/29/2010	5:44:08 PM	SiCl4 MFC set to  0.000000
7/29/2010	5:44:08 PM	Bypass solenoid MFC set to  0.000000
7/29/2010	5:44:08 PM	Tube furnace set to 0
7/29/2010	5:44:22 PM	H2 valve closed
7/29/2010	5:44:22 PM	BCl3 valve closed
7/29/2010	5:44:22 PM	PH3 valve closed
7/29/2010	5:44:22 PM	SiCl4 pre valve closed
7/29/2010	5:44:22 PM	SiCl4 post valve closed
7/29/2010	5:44:22 PM	Bubbler valve closed
7/29/2010	5:44:22 PM	Helium valve opened
7/29/2010	5:44:22 PM	Main Vac valve opened
7/29/2010	5:44:22 PM	Bypass valve opened
7/29/2010	5:44:22 PM	Helium MFC set to  100.000000
7/29/2010	5:44:22 PM	H2 MFC set to  0.000000
7/29/2010	5:44:22 PM	BCl3 MFC set to  0.000000
7/29/2010	5:44:22 PM	PHl3 MFC set to  0.000000
7/29/2010	5:44:22 PM	SiCl4 MFC set to  0.000000
7/29/2010	5:44:22 PM	Bypass solenoid MFC set to  0.000000
7/29/2010	5:44:22 PM	Tube furnace set to 0
7/29/2010	5:53:22 PM	Helium valve closed
7/29/2010	5:53:22 PM	H2 valve closed
7/29/2010	5:53:22 PM	BCl3 valve closed
7/29/2010	5:53:22 PM	PH3 valve closed
7/29/2010	5:53:22 PM	SiCl4 pre valve closed
7/29/2010	5:53:22 PM	SiCl4 post valve closed
7/29/2010	5:53:22 PM	Bubbler valve closed
7/29/2010	5:53:22 PM	Main Vac valve opened
7/29/2010	5:53:22 PM	Bypass valve opened
7/29/2010	5:53:22 PM	Helium MFC set to  0.000000
7/29/2010	5:53:22 PM	H2 MFC set to  0.000000
7/29/2010	5:53:22 PM	BCl3 MFC set to  0.000000
7/29/2010	5:53:22 PM	PHl3 MFC set to  0.000000
7/29/2010	5:53:22 PM	SiCl4 MFC set to  0.000000
7/29/2010	5:53:22 PM	Bypass solenoid MFC set to  0.000000
7/29/2010	5:53:23 PM	Tube furnace set to 0
7/29/2010	5:54:23 PM	H2 valve closed
7/29/2010	5:54:23 PM	BCl3 valve closed
7/29/2010	5:54:23 PM	PH3 valve closed
7/29/2010	5:54:23 PM	SiCl4 pre valve closed
7/29/2010	5:54:23 PM	SiCl4 post valve closed
7/29/2010	5:54:23 PM	Bubbler valve closed
7/29/2010	5:54:23 PM	Helium valve opened
7/29/2010	5:54:23 PM	Main Vac valve opened
7/29/2010	5:54:23 PM	Bypass valve opened
7/29/2010	5:54:23 PM	Helium MFC set to  100.000000
7/29/2010	5:54:23 PM	H2 MFC set to  0.000000
7/29/2010	5:54:23 PM	BCl3 MFC set to  0.000000
7/29/2010	5:54:23 PM	PHl3 MFC set to  0.000000
7/29/2010	5:54:23 PM	SiCl4 MFC set to  0.000000
7/29/2010	5:54:23 PM	Bypass solenoid MFC set to  0.000000
7/29/2010	5:54:23 PM	Tube furnace set to 0
7/29/2010	5:58:23 PM	Run aborted at 5:58 PM
7/29/2010	5:58:23 PM	Helium valve closed
7/29/2010	5:58:23 PM	H2 valve closed
7/29/2010	5:58:23 PM	BCl3 valve closed
7/29/2010	5:58:23 PM	PH3 valve closed
7/29/2010	5:58:23 PM	SiCl4 pre valve closed
7/29/2010	5:58:23 PM	SiCl4 post valve closed
7/29/2010	5:58:23 PM	Bypass valve closed
7/29/2010	5:58:23 PM	Main Vac valve closed
7/29/2010	5:58:23 PM	Bubbler valve closed
7/29/2010	5:58:23 PM	Helium MFC set to  0.000000
7/29/2010	5:58:23 PM	H2 MFC set to  0.000000
7/29/2010	5:58:23 PM	BCl3 MFC set to  0.000000
7/29/2010	5:58:23 PM	PHl3 MFC set to  0.000000
7/29/2010	5:58:23 PM	SiCl4 MFC set to  0.000000
7/29/2010	5:58:23 PM	Tube furnace set to 0
7/29/2010	5:58:23 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
7/29/2010	5:58:25 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/29/2010	5:58:26 PM	Recipe started at 5:58 PM
7/29/2010	5:58:26 PM	Helium valve closed
7/29/2010	5:58:26 PM	H2 valve closed
7/29/2010	5:58:26 PM	BCl3 valve closed
7/29/2010	5:58:26 PM	PH3 valve closed
7/29/2010	5:58:26 PM	SiCl4 pre valve closed
7/29/2010	5:58:26 PM	SiCl4 post valve closed
7/29/2010	5:58:26 PM	Main Vac valve closed
7/29/2010	5:58:26 PM	Bubbler valve closed
7/29/2010	5:58:26 PM	Bypass valve opened
7/29/2010	5:58:26 PM	Helium MFC set to  0.000000
7/29/2010	5:58:26 PM	H2 MFC set to  0.000000
7/29/2010	5:58:26 PM	BCl3 MFC set to  0.000000
7/29/2010	5:58:26 PM	PHl3 MFC set to  0.000000
7/29/2010	5:58:26 PM	SiCl4 MFC set to  0.000000
7/29/2010	5:58:26 PM	Bypass solenoid MFC set to  0.000000
7/29/2010	5:58:26 PM	Tube furnace set to 0
7/29/2010	5:58:26 PM	Helium valve closed
7/29/2010	5:58:26 PM	H2 valve closed
7/29/2010	5:58:26 PM	BCl3 valve closed
7/29/2010	5:58:26 PM	PH3 valve closed
7/29/2010	5:58:26 PM	SiCl4 pre valve closed
7/29/2010	5:58:26 PM	SiCl4 post valve closed
7/29/2010	5:58:26 PM	Bubbler valve closed
7/29/2010	5:58:26 PM	Main Vac valve opened
7/29/2010	5:58:26 PM	Bypass valve opened
7/29/2010	5:58:26 PM	Helium MFC set to  0.000000
7/29/2010	5:58:26 PM	H2 MFC set to  0.000000
7/29/2010	5:58:26 PM	BCl3 MFC set to  0.000000
7/29/2010	5:58:26 PM	PHl3 MFC set to  0.000000
7/29/2010	5:58:26 PM	SiCl4 MFC set to  0.000000
7/29/2010	5:58:26 PM	Bypass solenoid MFC set to  0.000000
7/29/2010	5:58:26 PM	Tube furnace set to 0
7/29/2010	5:58:27 PM	Run finished at 5:58 PM
7/29/2010	5:58:27 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/29/2010	5:59:31 PM	Recipe started at 5:59 PM
7/29/2010	5:59:31 PM	Helium valve closed
7/29/2010	5:59:31 PM	BCl3 valve closed
7/29/2010	5:59:31 PM	PH3 valve closed
7/29/2010	5:59:31 PM	SiCl4 pre valve closed
7/29/2010	5:59:31 PM	SiCl4 post valve closed
7/29/2010	5:59:31 PM	Main Vac valve closed
7/29/2010	5:59:31 PM	Bypass valve closed
7/29/2010	5:59:31 PM	Bubbler valve closed
7/29/2010	5:59:31 PM	H2 valve opened
7/29/2010	5:59:31 PM	Helium MFC set to  0.000000
7/29/2010	5:59:31 PM	H2 MFC set to  500.000000
7/29/2010	5:59:31 PM	BCl3 MFC set to  0.000000
7/29/2010	5:59:31 PM	PHl3 MFC set to  0.000000
7/29/2010	5:59:31 PM	SiCl4 MFC set to  0.000000
7/29/2010	5:59:31 PM	Bypass solenoid MFC set to  0.000000
7/29/2010	5:59:31 PM	Tube furnace set to 1000
7/29/2010	6:01:16 PM	Run aborted at 6:01 PM
7/29/2010	6:01:16 PM	Helium valve closed
7/29/2010	6:01:16 PM	H2 valve closed
7/29/2010	6:01:16 PM	BCl3 valve closed
7/29/2010	6:01:16 PM	PH3 valve closed
7/29/2010	6:01:16 PM	SiCl4 pre valve closed
7/29/2010	6:01:16 PM	SiCl4 post valve closed
7/29/2010	6:01:16 PM	Bypass valve closed
7/29/2010	6:01:16 PM	Main Vac valve closed
7/29/2010	6:01:16 PM	Bubbler valve closed
7/29/2010	6:01:16 PM	Helium MFC set to  0.000000
7/29/2010	6:01:16 PM	H2 MFC set to  0.000000
7/29/2010	6:01:16 PM	BCl3 MFC set to  0.000000
7/29/2010	6:01:16 PM	PHl3 MFC set to  0.000000
7/29/2010	6:01:16 PM	SiCl4 MFC set to  0.000000
7/29/2010	6:01:16 PM	Tube furnace set to 0
7/29/2010	6:02:31 PM	Recipe started at 6:02 PM
7/29/2010	6:02:31 PM	Helium valve closed
7/29/2010	6:02:31 PM	BCl3 valve closed
7/29/2010	6:02:31 PM	PH3 valve closed
7/29/2010	6:02:31 PM	SiCl4 pre valve closed
7/29/2010	6:02:31 PM	SiCl4 post valve closed
7/29/2010	6:02:31 PM	Main Vac valve closed
7/29/2010	6:02:31 PM	Bypass valve closed
7/29/2010	6:02:31 PM	Bubbler valve closed
7/29/2010	6:02:31 PM	H2 valve opened
7/29/2010	6:02:31 PM	Helium MFC set to  0.000000
7/29/2010	6:02:31 PM	H2 MFC set to  500.000000
7/29/2010	6:02:31 PM	BCl3 MFC set to  0.000000
7/29/2010	6:02:31 PM	PHl3 MFC set to  0.000000
7/29/2010	6:02:31 PM	SiCl4 MFC set to  0.000000
7/29/2010	6:02:31 PM	Bypass solenoid MFC set to  0.000000
7/29/2010	6:02:31 PM	Tube furnace set to 1000
7/29/2010	6:02:42 PM	Run aborted at 6:02 PM
7/29/2010	6:02:42 PM	Helium valve closed
7/29/2010	6:02:42 PM	H2 valve closed
7/29/2010	6:02:42 PM	BCl3 valve closed
7/29/2010	6:02:42 PM	PH3 valve closed
7/29/2010	6:02:42 PM	SiCl4 pre valve closed
7/29/2010	6:02:42 PM	SiCl4 post valve closed
7/29/2010	6:02:42 PM	Bypass valve closed
7/29/2010	6:02:42 PM	Main Vac valve closed
7/29/2010	6:02:42 PM	Bubbler valve closed
7/29/2010	6:02:42 PM	Helium MFC set to  0.000000
7/29/2010	6:02:42 PM	H2 MFC set to  0.000000
7/29/2010	6:02:42 PM	BCl3 MFC set to  0.000000
7/29/2010	6:02:42 PM	PHl3 MFC set to  0.000000
7/29/2010	6:02:42 PM	SiCl4 MFC set to  0.000000
7/29/2010	6:02:42 PM	Tube furnace set to 0
7/29/2010	6:03:06 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/29/2010	6:03:07 PM	Recipe started at 6:03 PM
7/29/2010	6:03:07 PM	Helium valve closed
7/29/2010	6:03:07 PM	H2 valve closed
7/29/2010	6:03:07 PM	BCl3 valve closed
7/29/2010	6:03:07 PM	PH3 valve closed
7/29/2010	6:03:07 PM	SiCl4 pre valve closed
7/29/2010	6:03:07 PM	SiCl4 post valve closed
7/29/2010	6:03:07 PM	Main Vac valve closed
7/29/2010	6:03:07 PM	Bubbler valve closed
7/29/2010	6:03:07 PM	Bypass valve opened
7/29/2010	6:03:07 PM	Helium MFC set to  0.000000
7/29/2010	6:03:07 PM	H2 MFC set to  0.000000
7/29/2010	6:03:07 PM	BCl3 MFC set to  0.000000
7/29/2010	6:03:07 PM	PHl3 MFC set to  0.000000
7/29/2010	6:03:07 PM	SiCl4 MFC set to  0.000000
7/29/2010	6:03:07 PM	Bypass solenoid MFC set to  0.000000
7/29/2010	6:03:07 PM	Tube furnace set to 0
7/29/2010	6:03:07 PM	Helium valve closed
7/29/2010	6:03:07 PM	H2 valve closed
7/29/2010	6:03:07 PM	BCl3 valve closed
7/29/2010	6:03:07 PM	PH3 valve closed
7/29/2010	6:03:07 PM	SiCl4 pre valve closed
7/29/2010	6:03:07 PM	SiCl4 post valve closed
7/29/2010	6:03:07 PM	Bubbler valve closed
7/29/2010	6:03:07 PM	Main Vac valve opened
7/29/2010	6:03:07 PM	Bypass valve opened
7/29/2010	6:03:07 PM	Helium MFC set to  0.000000
7/29/2010	6:03:07 PM	H2 MFC set to  0.000000
7/29/2010	6:03:07 PM	BCl3 MFC set to  0.000000
7/29/2010	6:03:07 PM	PHl3 MFC set to  0.000000
7/29/2010	6:03:07 PM	SiCl4 MFC set to  0.000000
7/29/2010	6:03:07 PM	Bypass solenoid MFC set to  0.000000
7/29/2010	6:03:08 PM	Tube furnace set to 0
7/29/2010	6:03:08 PM	Run finished at 6:03 PM
7/29/2010	6:03:08 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/29/2010	6:03:53 PM	H2 MFC set to  25.000000
7/29/2010	6:03:55 PM	H2 valve opened
7/29/2010	6:04:00 PM	H2 valve closed
7/29/2010	6:04:06 PM	H2 MFC set to  250.000000
7/29/2010	6:04:07 PM	H2 valve opened
7/29/2010	6:04:11 PM	H2 valve closed
7/29/2010	6:04:15 PM	H2 MFC set to  0.000000
7/29/2010	6:05:28 PM	Helium MFC set to  75.000000
7/29/2010	6:05:34 PM	Helium valve opened
7/29/2010	6:05:44 PM	Helium valve closed
7/29/2010	6:05:50 PM	H2 MFC set to  30.000000
7/29/2010	6:05:55 PM	H2 valve opened
7/29/2010	6:06:01 PM	H2 valve closed
7/29/2010	6:06:59 PM	Helium valve opened
7/29/2010	6:07:03 PM	Helium valve closed
7/29/2010	6:07:05 PM	H2 valve opened
7/29/2010	6:07:13 PM	H2 valve closed
7/29/2010	6:42:28 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
7/29/2010	6:42:31 PM	Recipe started at 6:42 PM
7/29/2010	6:42:31 PM	Helium valve closed
7/29/2010	6:42:31 PM	H2 valve closed
7/29/2010	6:42:31 PM	BCl3 valve closed
7/29/2010	6:42:31 PM	PH3 valve closed
7/29/2010	6:42:31 PM	SiCl4 pre valve closed
7/29/2010	6:42:31 PM	SiCl4 post valve closed
7/29/2010	6:42:31 PM	Main Vac valve closed
7/29/2010	6:42:31 PM	Bubbler valve closed
7/29/2010	6:42:31 PM	Bypass valve opened
7/29/2010	6:42:31 PM	Helium MFC set to  0.000000
7/29/2010	6:42:31 PM	H2 MFC set to  0.000000
7/29/2010	6:42:31 PM	BCl3 MFC set to  0.000000
7/29/2010	6:42:31 PM	PHl3 MFC set to  0.000000
7/29/2010	6:42:31 PM	SiCl4 MFC set to  0.000000
7/29/2010	6:42:31 PM	Bypass solenoid MFC set to  0.000000
7/29/2010	6:42:32 PM	Tube furnace set to 0
7/29/2010	6:42:32 PM	Helium valve closed
7/29/2010	6:42:32 PM	H2 valve closed
7/29/2010	6:42:32 PM	BCl3 valve closed
7/29/2010	6:42:32 PM	PH3 valve closed
7/29/2010	6:42:32 PM	SiCl4 pre valve closed
7/29/2010	6:42:32 PM	SiCl4 post valve closed
7/29/2010	6:42:32 PM	Bubbler valve closed
7/29/2010	6:42:32 PM	Main Vac valve opened
7/29/2010	6:42:32 PM	Bypass valve opened
7/29/2010	6:42:32 PM	Helium MFC set to  0.000000
7/29/2010	6:42:32 PM	H2 MFC set to  0.000000
7/29/2010	6:42:32 PM	BCl3 MFC set to  0.000000
7/29/2010	6:42:32 PM	PHl3 MFC set to  0.000000
7/29/2010	6:42:32 PM	SiCl4 MFC set to  0.000000
7/29/2010	6:42:32 PM	Bypass solenoid MFC set to  0.000000
7/29/2010	6:42:32 PM	Tube furnace set to 0
7/29/2010	6:43:32 PM	H2 valve closed
7/29/2010	6:43:32 PM	BCl3 valve closed
7/29/2010	6:43:32 PM	PH3 valve closed
7/29/2010	6:43:32 PM	SiCl4 pre valve closed
7/29/2010	6:43:32 PM	SiCl4 post valve closed
7/29/2010	6:43:32 PM	Bubbler valve closed
7/29/2010	6:43:32 PM	Helium valve opened
7/29/2010	6:43:32 PM	Main Vac valve opened
7/29/2010	6:43:32 PM	Bypass valve opened
7/29/2010	6:43:32 PM	Helium MFC set to  100.000000
7/29/2010	6:43:32 PM	H2 MFC set to  0.000000
7/29/2010	6:43:32 PM	BCl3 MFC set to  0.000000
7/29/2010	6:43:32 PM	PHl3 MFC set to  0.000000
7/29/2010	6:43:32 PM	SiCl4 MFC set to  0.000000
7/29/2010	6:43:32 PM	Bypass solenoid MFC set to  0.000000
7/29/2010	6:43:32 PM	Tube furnace set to 0
7/29/2010	6:45:17 PM	Helium valve closed
7/29/2010	6:45:17 PM	H2 valve closed
7/29/2010	6:45:17 PM	BCl3 valve closed
7/29/2010	6:45:17 PM	PH3 valve closed
7/29/2010	6:45:17 PM	SiCl4 pre valve closed
7/29/2010	6:45:17 PM	SiCl4 post valve closed
7/29/2010	6:45:17 PM	Bubbler valve closed
7/29/2010	6:45:17 PM	Main Vac valve opened
7/29/2010	6:45:17 PM	Bypass valve opened
7/29/2010	6:45:17 PM	Helium MFC set to  0.000000
7/29/2010	6:45:17 PM	H2 MFC set to  0.000000
7/29/2010	6:45:17 PM	BCl3 MFC set to  0.000000
7/29/2010	6:45:17 PM	PHl3 MFC set to  0.000000
7/29/2010	6:45:17 PM	SiCl4 MFC set to  0.000000
7/29/2010	6:45:17 PM	Bypass solenoid MFC set to  0.000000
7/29/2010	6:45:17 PM	Tube furnace set to 0
7/29/2010	6:45:19 PM	Run aborted at 6:45 PM
7/29/2010	6:45:19 PM	Helium valve closed
7/29/2010	6:45:19 PM	H2 valve closed
7/29/2010	6:45:19 PM	BCl3 valve closed
7/29/2010	6:45:19 PM	PH3 valve closed
7/29/2010	6:45:19 PM	SiCl4 pre valve closed
7/29/2010	6:45:19 PM	SiCl4 post valve closed
7/29/2010	6:45:19 PM	Bypass valve closed
7/29/2010	6:45:19 PM	Main Vac valve closed
7/29/2010	6:45:19 PM	Bubbler valve closed
7/29/2010	6:45:19 PM	Helium MFC set to  0.000000
7/29/2010	6:45:19 PM	H2 MFC set to  0.000000
7/29/2010	6:45:19 PM	BCl3 MFC set to  0.000000
7/29/2010	6:45:19 PM	PHl3 MFC set to  0.000000
7/29/2010	6:45:19 PM	SiCl4 MFC set to  0.000000
7/29/2010	6:45:19 PM	Tube furnace set to 0
7/29/2010	6:45:19 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
7/29/2010	6:45:21 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/29/2010	6:45:21 PM	Recipe started at 6:45 PM
7/29/2010	6:45:21 PM	Helium valve closed
7/29/2010	6:45:21 PM	H2 valve closed
7/29/2010	6:45:21 PM	BCl3 valve closed
7/29/2010	6:45:21 PM	PH3 valve closed
7/29/2010	6:45:21 PM	SiCl4 pre valve closed
7/29/2010	6:45:21 PM	SiCl4 post valve closed
7/29/2010	6:45:21 PM	Main Vac valve closed
7/29/2010	6:45:21 PM	Bubbler valve closed
7/29/2010	6:45:21 PM	Bypass valve opened
7/29/2010	6:45:21 PM	Helium MFC set to  0.000000
7/29/2010	6:45:21 PM	H2 MFC set to  0.000000
7/29/2010	6:45:21 PM	BCl3 MFC set to  0.000000
7/29/2010	6:45:21 PM	PHl3 MFC set to  0.000000
7/29/2010	6:45:21 PM	SiCl4 MFC set to  0.000000
7/29/2010	6:45:21 PM	Bypass solenoid MFC set to  0.000000
7/29/2010	6:45:22 PM	Tube furnace set to 0
7/29/2010	6:45:22 PM	Helium valve closed
7/29/2010	6:45:22 PM	H2 valve closed
7/29/2010	6:45:22 PM	BCl3 valve closed
7/29/2010	6:45:22 PM	PH3 valve closed
7/29/2010	6:45:22 PM	SiCl4 pre valve closed
7/29/2010	6:45:22 PM	SiCl4 post valve closed
7/29/2010	6:45:22 PM	Bubbler valve closed
7/29/2010	6:45:22 PM	Main Vac valve opened
7/29/2010	6:45:22 PM	Bypass valve opened
7/29/2010	6:45:22 PM	Helium MFC set to  0.000000
7/29/2010	6:45:22 PM	H2 MFC set to  0.000000
7/29/2010	6:45:22 PM	BCl3 MFC set to  0.000000
7/29/2010	6:45:22 PM	PHl3 MFC set to  0.000000
7/29/2010	6:45:22 PM	SiCl4 MFC set to  0.000000
7/29/2010	6:45:22 PM	Bypass solenoid MFC set to  0.000000
7/29/2010	6:45:22 PM	Tube furnace set to 0
7/29/2010	6:45:22 PM	Run finished at 6:45 PM
7/29/2010	6:45:22 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/29/2010	6:46:11 PM	Recipe started at 6:46 PM
7/29/2010	6:46:11 PM	Helium valve closed
7/29/2010	6:46:11 PM	BCl3 valve closed
7/29/2010	6:46:11 PM	PH3 valve closed
7/29/2010	6:46:11 PM	SiCl4 pre valve closed
7/29/2010	6:46:11 PM	SiCl4 post valve closed
7/29/2010	6:46:11 PM	Main Vac valve closed
7/29/2010	6:46:11 PM	Bypass valve closed
7/29/2010	6:46:11 PM	Bubbler valve closed
7/29/2010	6:46:11 PM	H2 valve opened
7/29/2010	6:46:11 PM	Helium MFC set to  0.000000
7/29/2010	6:46:11 PM	H2 MFC set to  500.000000
7/29/2010	6:46:11 PM	BCl3 MFC set to  0.000000
7/29/2010	6:46:11 PM	PHl3 MFC set to  0.000000
7/29/2010	6:46:11 PM	SiCl4 MFC set to  0.000000
7/29/2010	6:46:11 PM	Bypass solenoid MFC set to  0.000000
7/29/2010	6:46:11 PM	Tube furnace set to 1000
7/29/2010	6:47:28 PM	Helium valve closed
7/29/2010	6:47:28 PM	BCl3 valve closed
7/29/2010	6:47:28 PM	PH3 valve closed
7/29/2010	6:47:28 PM	SiCl4 pre valve closed
7/29/2010	6:47:28 PM	SiCl4 post valve closed
7/29/2010	6:47:28 PM	Main Vac valve closed
7/29/2010	6:47:28 PM	Bypass valve closed
7/29/2010	6:47:28 PM	H2 valve opened
7/29/2010	6:47:28 PM	Bubbler valve opened
7/29/2010	6:47:28 PM	Helium MFC set to  0.000000
7/29/2010	6:47:28 PM	H2 MFC set to  500.000000
7/29/2010	6:47:28 PM	BCl3 MFC set to  0.000000
7/29/2010	6:47:28 PM	PHl3 MFC set to  0.000000
7/29/2010	6:47:28 PM	SiCl4 MFC set to  0.000000
7/29/2010	6:47:28 PM	Bypass solenoid MFC set to  0.000000
7/29/2010	6:47:29 PM	Tube furnace set to 1000
7/29/2010	7:07:29 PM	Helium valve closed
7/29/2010	7:07:29 PM	PH3 valve closed
7/29/2010	7:07:29 PM	Main Vac valve closed
7/29/2010	7:07:29 PM	Bypass valve closed
7/29/2010	7:07:29 PM	H2 valve opened
7/29/2010	7:07:29 PM	BCl3 valve opened
7/29/2010	7:07:29 PM	SiCl4 pre valve opened
7/29/2010	7:07:29 PM	SiCl4 post valve opened
7/29/2010	7:07:29 PM	Bubbler valve opened
7/29/2010	7:07:29 PM	Helium MFC set to  0.000000
7/29/2010	7:07:29 PM	H2 MFC set to  500.000000
7/29/2010	7:07:29 PM	BCl3 MFC set to  35.000000
7/29/2010	7:07:29 PM	PHl3 MFC set to  0.000000
7/29/2010	7:07:29 PM	SiCl4 MFC set to  50.000000
7/29/2010	7:07:29 PM	Bypass solenoid MFC set to  0.000000
7/29/2010	7:07:29 PM	Tube furnace set to 1000
7/29/2010	7:12:29 PM	Helium valve closed
7/29/2010	7:12:29 PM	BCl3 valve closed
7/29/2010	7:12:29 PM	PH3 valve closed
7/29/2010	7:12:29 PM	SiCl4 pre valve closed
7/29/2010	7:12:29 PM	SiCl4 post valve closed
7/29/2010	7:12:29 PM	Main Vac valve closed
7/29/2010	7:12:29 PM	Bypass valve closed
7/29/2010	7:12:29 PM	H2 valve opened
7/29/2010	7:12:29 PM	Bubbler valve opened
7/29/2010	7:12:29 PM	Helium MFC set to  0.000000
7/29/2010	7:12:29 PM	H2 MFC set to  500.000000
7/29/2010	7:12:29 PM	BCl3 MFC set to  0.000000
7/29/2010	7:12:29 PM	PHl3 MFC set to  0.000000
7/29/2010	7:12:29 PM	SiCl4 MFC set to  0.000000
7/29/2010	7:12:29 PM	Bypass solenoid MFC set to  0.000000
7/29/2010	7:12:29 PM	Tube furnace set to 750
7/29/2010	7:32:29 PM	H2 valve closed
7/29/2010	7:32:29 PM	BCl3 valve closed
7/29/2010	7:32:29 PM	PH3 valve closed
7/29/2010	7:32:29 PM	SiCl4 pre valve closed
7/29/2010	7:32:29 PM	SiCl4 post valve closed
7/29/2010	7:32:29 PM	Main Vac valve closed
7/29/2010	7:32:29 PM	Bypass valve closed
7/29/2010	7:32:29 PM	Helium valve opened
7/29/2010	7:32:29 PM	Bubbler valve opened
7/29/2010	7:32:29 PM	Helium MFC set to  500.000000
7/29/2010	7:32:29 PM	H2 MFC set to  0.000000
7/29/2010	7:32:29 PM	BCl3 MFC set to  0.000000
7/29/2010	7:32:29 PM	PHl3 MFC set to  0.000000
7/29/2010	7:32:29 PM	SiCl4 MFC set to  0.000000
7/29/2010	7:32:29 PM	Bypass solenoid MFC set to  0.000000
7/29/2010	7:32:29 PM	Tube furnace set to 0
7/29/2010	7:38:40 PM	Run aborted at 7:38 PM
7/29/2010	7:38:40 PM	Helium valve closed
7/29/2010	7:38:40 PM	H2 valve closed
7/29/2010	7:38:40 PM	BCl3 valve closed
7/29/2010	7:38:40 PM	PH3 valve closed
7/29/2010	7:38:40 PM	SiCl4 pre valve closed
7/29/2010	7:38:40 PM	SiCl4 post valve closed
7/29/2010	7:38:40 PM	Bypass valve closed
7/29/2010	7:38:40 PM	Main Vac valve closed
7/29/2010	7:38:40 PM	Bubbler valve closed
7/29/2010	7:38:40 PM	Helium MFC set to  0.000000
7/29/2010	7:38:40 PM	H2 MFC set to  0.000000
7/29/2010	7:38:40 PM	BCl3 MFC set to  0.000000
7/29/2010	7:38:40 PM	PHl3 MFC set to  0.000000
7/29/2010	7:38:40 PM	SiCl4 MFC set to  0.000000
7/29/2010	7:38:40 PM	Tube furnace set to 0
7/29/2010	7:38:41 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/29/2010	7:38:42 PM	Recipe started at 7:38 PM
7/29/2010	7:38:42 PM	H2 valve closed
7/29/2010	7:38:42 PM	BCl3 valve closed
7/29/2010	7:38:42 PM	PH3 valve closed
7/29/2010	7:38:42 PM	SiCl4 pre valve closed
7/29/2010	7:38:42 PM	SiCl4 post valve closed
7/29/2010	7:38:42 PM	Main Vac valve closed
7/29/2010	7:38:42 PM	Bypass valve closed
7/29/2010	7:38:42 PM	Bubbler valve closed
7/29/2010	7:38:42 PM	Helium valve opened
7/29/2010	7:38:42 PM	Helium MFC set to  500.000000
7/29/2010	7:38:42 PM	H2 MFC set to  0.000000
7/29/2010	7:38:42 PM	BCl3 MFC set to  0.000000
7/29/2010	7:38:42 PM	PHl3 MFC set to  0.000000
7/29/2010	7:38:42 PM	SiCl4 MFC set to  0.000000
7/29/2010	7:38:42 PM	Bypass solenoid MFC set to  0.000000
7/29/2010	7:38:42 PM	Tube furnace set to 0
7/29/2010	7:39:09 PM	Run aborted at 7:39 PM
7/29/2010	7:39:09 PM	Helium valve closed
7/29/2010	7:39:09 PM	H2 valve closed
7/29/2010	7:39:09 PM	BCl3 valve closed
7/29/2010	7:39:09 PM	PH3 valve closed
7/29/2010	7:39:09 PM	SiCl4 pre valve closed
7/29/2010	7:39:09 PM	SiCl4 post valve closed
7/29/2010	7:39:09 PM	Bypass valve closed
7/29/2010	7:39:09 PM	Main Vac valve closed
7/29/2010	7:39:09 PM	Bubbler valve closed
7/29/2010	7:39:09 PM	Helium MFC set to  0.000000
7/29/2010	7:39:09 PM	H2 MFC set to  0.000000
7/29/2010	7:39:09 PM	BCl3 MFC set to  0.000000
7/29/2010	7:39:09 PM	PHl3 MFC set to  0.000000
7/29/2010	7:39:09 PM	SiCl4 MFC set to  0.000000
7/29/2010	7:39:09 PM	Tube furnace set to 0
7/29/2010	7:39:09 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/29/2010	7:57:37 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
7/29/2010	7:57:40 PM	Recipe started at 7:57 PM
7/29/2010	7:57:40 PM	Helium valve closed
7/29/2010	7:57:40 PM	H2 valve closed
7/29/2010	7:57:40 PM	BCl3 valve closed
7/29/2010	7:57:40 PM	PH3 valve closed
7/29/2010	7:57:40 PM	SiCl4 pre valve closed
7/29/2010	7:57:40 PM	SiCl4 post valve closed
7/29/2010	7:57:40 PM	Main Vac valve closed
7/29/2010	7:57:40 PM	Bubbler valve closed
7/29/2010	7:57:40 PM	Bypass valve opened
7/29/2010	7:57:40 PM	Helium MFC set to  0.000000
7/29/2010	7:57:40 PM	H2 MFC set to  0.000000
7/29/2010	7:57:40 PM	BCl3 MFC set to  0.000000
7/29/2010	7:57:40 PM	PHl3 MFC set to  0.000000
7/29/2010	7:57:40 PM	SiCl4 MFC set to  0.000000
7/29/2010	7:57:40 PM	Bypass solenoid MFC set to  0.000000
7/29/2010	7:57:40 PM	Tube furnace set to 0
7/29/2010	8:09:47 PM	Run aborted at 8:09 PM
7/29/2010	8:09:47 PM	Helium valve closed
7/29/2010	8:09:47 PM	H2 valve closed
7/29/2010	8:09:47 PM	BCl3 valve closed
7/29/2010	8:09:47 PM	PH3 valve closed
7/29/2010	8:09:47 PM	SiCl4 pre valve closed
7/29/2010	8:09:47 PM	SiCl4 post valve closed
7/29/2010	8:09:47 PM	Bypass valve closed
7/29/2010	8:09:47 PM	Main Vac valve closed
7/29/2010	8:09:47 PM	Bubbler valve closed
7/29/2010	8:09:47 PM	Helium MFC set to  0.000000
7/29/2010	8:09:47 PM	H2 MFC set to  0.000000
7/29/2010	8:09:47 PM	BCl3 MFC set to  0.000000
7/29/2010	8:09:47 PM	PHl3 MFC set to  0.000000
7/29/2010	8:09:47 PM	SiCl4 MFC set to  0.000000
7/29/2010	8:09:47 PM	Tube furnace set to 0
7/29/2010	8:09:47 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
7/29/2010	8:09:49 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/29/2010	8:09:50 PM	Recipe started at 8:09 PM
7/29/2010	8:09:50 PM	Helium valve closed
7/29/2010	8:09:50 PM	H2 valve closed
7/29/2010	8:09:50 PM	BCl3 valve closed
7/29/2010	8:09:50 PM	PH3 valve closed
7/29/2010	8:09:50 PM	SiCl4 pre valve closed
7/29/2010	8:09:50 PM	SiCl4 post valve closed
7/29/2010	8:09:50 PM	Main Vac valve closed
7/29/2010	8:09:50 PM	Bubbler valve closed
7/29/2010	8:09:50 PM	Bypass valve opened
7/29/2010	8:09:50 PM	Helium MFC set to  0.000000
7/29/2010	8:09:50 PM	H2 MFC set to  0.000000
7/29/2010	8:09:50 PM	BCl3 MFC set to  0.000000
7/29/2010	8:09:50 PM	PHl3 MFC set to  0.000000
7/29/2010	8:09:50 PM	SiCl4 MFC set to  0.000000
7/29/2010	8:09:50 PM	Bypass solenoid MFC set to  0.000000
7/29/2010	8:09:50 PM	Tube furnace set to 0
7/29/2010	8:10:11 PM	Run aborted at 8:10 PM
7/29/2010	8:10:11 PM	Helium valve closed
7/29/2010	8:10:11 PM	H2 valve closed
7/29/2010	8:10:11 PM	BCl3 valve closed
7/29/2010	8:10:11 PM	PH3 valve closed
7/29/2010	8:10:11 PM	SiCl4 pre valve closed
7/29/2010	8:10:11 PM	SiCl4 post valve closed
7/29/2010	8:10:11 PM	Bypass valve closed
7/29/2010	8:10:11 PM	Main Vac valve closed
7/29/2010	8:10:11 PM	Bubbler valve closed
7/29/2010	8:10:11 PM	Helium MFC set to  0.000000
7/29/2010	8:10:11 PM	H2 MFC set to  0.000000
7/29/2010	8:10:11 PM	BCl3 MFC set to  0.000000
7/29/2010	8:10:11 PM	PHl3 MFC set to  0.000000
7/29/2010	8:10:11 PM	SiCl4 MFC set to  0.000000
7/29/2010	8:10:11 PM	Tube furnace set to 0
7/29/2010	8:10:11 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/29/2010	8:10:13 PM	Bypass valve opened
7/29/2010	8:10:14 PM	Main Vac valve opened
7/29/2010	8:10:15 PM	Main Vac valve closed
7/29/2010	8:10:16 PM	Main Vac valve opened
7/29/2010	8:10:21 PM	Main Vac valve closed
7/29/2010	8:10:36 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/29/2010	8:10:37 PM	Recipe started at 8:10 PM
7/29/2010	8:10:37 PM	Helium valve closed
7/29/2010	8:10:37 PM	H2 valve closed
7/29/2010	8:10:37 PM	BCl3 valve closed
7/29/2010	8:10:37 PM	PH3 valve closed
7/29/2010	8:10:37 PM	SiCl4 pre valve closed
7/29/2010	8:10:37 PM	SiCl4 post valve closed
7/29/2010	8:10:37 PM	Main Vac valve closed
7/29/2010	8:10:37 PM	Bubbler valve closed
7/29/2010	8:10:37 PM	Bypass valve opened
7/29/2010	8:10:37 PM	Helium MFC set to  0.000000
7/29/2010	8:10:37 PM	H2 MFC set to  0.000000
7/29/2010	8:10:37 PM	BCl3 MFC set to  0.000000
7/29/2010	8:10:37 PM	PHl3 MFC set to  0.000000
7/29/2010	8:10:37 PM	SiCl4 MFC set to  0.000000
7/29/2010	8:10:37 PM	Bypass solenoid MFC set to  0.000000
7/29/2010	8:10:37 PM	Tube furnace set to 0
7/29/2010	8:11:58 PM	Helium valve closed
7/29/2010	8:11:58 PM	H2 valve closed
7/29/2010	8:11:58 PM	BCl3 valve closed
7/29/2010	8:11:58 PM	PH3 valve closed
7/29/2010	8:11:58 PM	SiCl4 pre valve closed
7/29/2010	8:11:58 PM	SiCl4 post valve closed
7/29/2010	8:11:58 PM	Bubbler valve closed
7/29/2010	8:11:58 PM	Main Vac valve opened
7/29/2010	8:11:58 PM	Bypass valve opened
7/29/2010	8:11:58 PM	Helium MFC set to  0.000000
7/29/2010	8:11:58 PM	H2 MFC set to  0.000000
7/29/2010	8:11:58 PM	BCl3 MFC set to  0.000000
7/29/2010	8:11:58 PM	PHl3 MFC set to  0.000000
7/29/2010	8:11:58 PM	SiCl4 MFC set to  0.000000
7/29/2010	8:11:58 PM	Bypass solenoid MFC set to  0.000000
7/29/2010	8:11:58 PM	Tube furnace set to 0
7/29/2010	8:11:59 PM	Run finished at 8:11 PM
7/29/2010	8:11:59 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/29/2010	8:12:07 PM	Main Vac valve closed
7/29/2010	8:12:08 PM	Bypass valve closed
7/29/2010	8:12:11 PM	Helium MFC set to  100.000000
7/29/2010	8:12:12 PM	Helium valve opened
7/29/2010	8:12:16 PM	Bypass valve opened
7/29/2010	8:12:24 PM	Helium MFC set to  500.000000
7/29/2010	8:12:36 PM	Helium valve closed
7/29/2010	8:13:01 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
7/29/2010	8:13:04 PM	Recipe started at 8:13 PM
7/29/2010	8:13:04 PM	Helium valve closed
7/29/2010	8:13:04 PM	H2 valve closed
7/29/2010	8:13:04 PM	BCl3 valve closed
7/29/2010	8:13:04 PM	PH3 valve closed
7/29/2010	8:13:04 PM	SiCl4 pre valve closed
7/29/2010	8:13:04 PM	SiCl4 post valve closed
7/29/2010	8:13:04 PM	Main Vac valve closed
7/29/2010	8:13:04 PM	Bubbler valve closed
7/29/2010	8:13:04 PM	Bypass valve opened
7/29/2010	8:13:04 PM	Helium MFC set to  0.000000
7/29/2010	8:13:04 PM	H2 MFC set to  0.000000
7/29/2010	8:13:04 PM	BCl3 MFC set to  0.000000
7/29/2010	8:13:04 PM	PHl3 MFC set to  0.000000
7/29/2010	8:13:04 PM	SiCl4 MFC set to  0.000000
7/29/2010	8:13:04 PM	Bypass solenoid MFC set to  0.000000
7/29/2010	8:13:04 PM	Tube furnace set to 0
7/29/2010	8:14:32 PM	Run aborted at 8:14 PM
7/29/2010	8:14:32 PM	Helium valve closed
7/29/2010	8:14:32 PM	H2 valve closed
7/29/2010	8:14:32 PM	BCl3 valve closed
7/29/2010	8:14:32 PM	PH3 valve closed
7/29/2010	8:14:32 PM	SiCl4 pre valve closed
7/29/2010	8:14:32 PM	SiCl4 post valve closed
7/29/2010	8:14:32 PM	Bypass valve closed
7/29/2010	8:14:32 PM	Main Vac valve closed
7/29/2010	8:14:32 PM	Bubbler valve closed
7/29/2010	8:14:32 PM	Helium MFC set to  0.000000
7/29/2010	8:14:32 PM	H2 MFC set to  0.000000
7/29/2010	8:14:32 PM	BCl3 MFC set to  0.000000
7/29/2010	8:14:32 PM	PHl3 MFC set to  0.000000
7/29/2010	8:14:32 PM	SiCl4 MFC set to  0.000000
7/29/2010	8:14:32 PM	Tube furnace set to 0
7/29/2010	8:14:32 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
7/29/2010	8:14:58 PM	Helium MFC set to  100.000000
7/29/2010	8:14:58 PM	Helium valve opened
7/29/2010	8:15:16 PM	Helium valve closed
7/29/2010	8:18:59 PM	Helium valve opened
7/29/2010	8:19:16 PM	Helium valve closed
7/29/2010	8:19:20 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/29/2010	8:19:21 PM	Recipe started at 8:19 PM
7/29/2010	8:19:21 PM	Helium valve closed
7/29/2010	8:19:21 PM	H2 valve closed
7/29/2010	8:19:21 PM	BCl3 valve closed
7/29/2010	8:19:21 PM	PH3 valve closed
7/29/2010	8:19:21 PM	SiCl4 pre valve closed
7/29/2010	8:19:21 PM	SiCl4 post valve closed
7/29/2010	8:19:21 PM	Main Vac valve closed
7/29/2010	8:19:21 PM	Bubbler valve closed
7/29/2010	8:19:21 PM	Bypass valve opened
7/29/2010	8:19:21 PM	Helium MFC set to  0.000000
7/29/2010	8:19:21 PM	H2 MFC set to  0.000000
7/29/2010	8:19:21 PM	BCl3 MFC set to  0.000000
7/29/2010	8:19:21 PM	PHl3 MFC set to  0.000000
7/29/2010	8:19:21 PM	SiCl4 MFC set to  0.000000
7/29/2010	8:19:21 PM	Bypass solenoid MFC set to  0.000000
7/29/2010	8:19:21 PM	Tube furnace set to 0
7/29/2010	8:21:49 PM	Run aborted at 8:21 PM
7/29/2010	8:21:49 PM	Helium valve closed
7/29/2010	8:21:49 PM	H2 valve closed
7/29/2010	8:21:49 PM	BCl3 valve closed
7/29/2010	8:21:49 PM	PH3 valve closed
7/29/2010	8:21:49 PM	SiCl4 pre valve closed
7/29/2010	8:21:49 PM	SiCl4 post valve closed
7/29/2010	8:21:49 PM	Bypass valve closed
7/29/2010	8:21:49 PM	Main Vac valve closed
7/29/2010	8:21:49 PM	Bubbler valve closed
7/29/2010	8:21:49 PM	Helium MFC set to  0.000000
7/29/2010	8:21:49 PM	H2 MFC set to  0.000000
7/29/2010	8:21:49 PM	BCl3 MFC set to  0.000000
7/29/2010	8:21:49 PM	PHl3 MFC set to  0.000000
7/29/2010	8:21:49 PM	SiCl4 MFC set to  0.000000
7/29/2010	8:21:50 PM	Tube furnace set to 0
7/29/2010	8:21:50 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/29/2010	8:25:26 PM	Bypass valve opened
7/29/2010	8:25:43 PM	Bypass valve closed
7/29/2010	8:25:45 PM	Bypass valve opened
7/29/2010	8:26:12 PM	Main Vac valve opened
7/29/2010	8:29:11 PM	Bypass valve closed
7/29/2010	8:29:21 PM	Main Vac valve closed
7/29/2010	8:29:28 PM	Main Vac valve opened
7/29/2010	8:29:28 PM	Bypass valve opened
7/29/2010	8:29:37 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
7/29/2010	8:29:40 PM	Recipe started at 8:29 PM
7/29/2010	8:29:40 PM	Helium valve closed
7/29/2010	8:29:40 PM	H2 valve closed
7/29/2010	8:29:40 PM	BCl3 valve closed
7/29/2010	8:29:40 PM	PH3 valve closed
7/29/2010	8:29:40 PM	SiCl4 pre valve closed
7/29/2010	8:29:40 PM	SiCl4 post valve closed
7/29/2010	8:29:40 PM	Main Vac valve closed
7/29/2010	8:29:40 PM	Bubbler valve closed
7/29/2010	8:29:40 PM	Bypass valve opened
7/29/2010	8:29:40 PM	Helium MFC set to  0.000000
7/29/2010	8:29:40 PM	H2 MFC set to  0.000000
7/29/2010	8:29:40 PM	BCl3 MFC set to  0.000000
7/29/2010	8:29:40 PM	PHl3 MFC set to  0.000000
7/29/2010	8:29:40 PM	SiCl4 MFC set to  0.000000
7/29/2010	8:29:40 PM	Bypass solenoid MFC set to  0.000000
7/29/2010	8:29:40 PM	Tube furnace set to 0
7/29/2010	8:29:40 PM	Helium valve closed
7/29/2010	8:29:40 PM	H2 valve closed
7/29/2010	8:29:40 PM	BCl3 valve closed
7/29/2010	8:29:40 PM	PH3 valve closed
7/29/2010	8:29:40 PM	SiCl4 pre valve closed
7/29/2010	8:29:40 PM	SiCl4 post valve closed
7/29/2010	8:29:40 PM	Bubbler valve closed
7/29/2010	8:29:40 PM	Main Vac valve opened
7/29/2010	8:29:40 PM	Bypass valve opened
7/29/2010	8:29:40 PM	Helium MFC set to  0.000000
7/29/2010	8:29:40 PM	H2 MFC set to  0.000000
7/29/2010	8:29:40 PM	BCl3 MFC set to  0.000000
7/29/2010	8:29:40 PM	PHl3 MFC set to  0.000000
7/29/2010	8:29:40 PM	SiCl4 MFC set to  0.000000
7/29/2010	8:29:40 PM	Bypass solenoid MFC set to  0.000000
7/29/2010	8:29:40 PM	Tube furnace set to 0
7/29/2010	8:30:40 PM	H2 valve closed
7/29/2010	8:30:40 PM	BCl3 valve closed
7/29/2010	8:30:40 PM	PH3 valve closed
7/29/2010	8:30:40 PM	SiCl4 pre valve closed
7/29/2010	8:30:40 PM	SiCl4 post valve closed
7/29/2010	8:30:40 PM	Bubbler valve closed
7/29/2010	8:30:40 PM	Helium valve opened
7/29/2010	8:30:40 PM	Main Vac valve opened
7/29/2010	8:30:40 PM	Bypass valve opened
7/29/2010	8:30:40 PM	Helium MFC set to  100.000000
7/29/2010	8:30:40 PM	H2 MFC set to  0.000000
7/29/2010	8:30:40 PM	BCl3 MFC set to  0.000000
7/29/2010	8:30:40 PM	PHl3 MFC set to  0.000000
7/29/2010	8:30:40 PM	SiCl4 MFC set to  0.000000
7/29/2010	8:30:40 PM	Bypass solenoid MFC set to  0.000000
7/29/2010	8:30:40 PM	Tube furnace set to 0
7/29/2010	8:39:40 PM	Helium valve closed
7/29/2010	8:39:40 PM	H2 valve closed
7/29/2010	8:39:40 PM	BCl3 valve closed
7/29/2010	8:39:40 PM	PH3 valve closed
7/29/2010	8:39:40 PM	SiCl4 pre valve closed
7/29/2010	8:39:40 PM	SiCl4 post valve closed
7/29/2010	8:39:40 PM	Bubbler valve closed
7/29/2010	8:39:40 PM	Main Vac valve opened
7/29/2010	8:39:40 PM	Bypass valve opened
7/29/2010	8:39:40 PM	Helium MFC set to  0.000000
7/29/2010	8:39:40 PM	H2 MFC set to  0.000000
7/29/2010	8:39:40 PM	BCl3 MFC set to  0.000000
7/29/2010	8:39:40 PM	PHl3 MFC set to  0.000000
7/29/2010	8:39:40 PM	SiCl4 MFC set to  0.000000
7/29/2010	8:39:40 PM	Bypass solenoid MFC set to  0.000000
7/29/2010	8:39:41 PM	Tube furnace set to 0
7/29/2010	8:40:41 PM	H2 valve closed
7/29/2010	8:40:41 PM	BCl3 valve closed
7/29/2010	8:40:41 PM	PH3 valve closed
7/29/2010	8:40:41 PM	SiCl4 pre valve closed
7/29/2010	8:40:41 PM	SiCl4 post valve closed
7/29/2010	8:40:41 PM	Bubbler valve closed
7/29/2010	8:40:41 PM	Helium valve opened
7/29/2010	8:40:41 PM	Main Vac valve opened
7/29/2010	8:40:41 PM	Bypass valve opened
7/29/2010	8:40:41 PM	Helium MFC set to  100.000000
7/29/2010	8:40:41 PM	H2 MFC set to  0.000000
7/29/2010	8:40:41 PM	BCl3 MFC set to  0.000000
7/29/2010	8:40:41 PM	PHl3 MFC set to  0.000000
7/29/2010	8:40:41 PM	SiCl4 MFC set to  0.000000
7/29/2010	8:40:41 PM	Bypass solenoid MFC set to  0.000000
7/29/2010	8:40:41 PM	Tube furnace set to 0
7/29/2010	8:49:41 PM	Helium valve closed
7/29/2010	8:49:41 PM	H2 valve closed
7/29/2010	8:49:41 PM	BCl3 valve closed
7/29/2010	8:49:41 PM	PH3 valve closed
7/29/2010	8:49:41 PM	SiCl4 pre valve closed
7/29/2010	8:49:41 PM	SiCl4 post valve closed
7/29/2010	8:49:41 PM	Bubbler valve closed
7/29/2010	8:49:41 PM	Main Vac valve opened
7/29/2010	8:49:41 PM	Bypass valve opened
7/29/2010	8:49:41 PM	Helium MFC set to  0.000000
7/29/2010	8:49:41 PM	H2 MFC set to  0.000000
7/29/2010	8:49:41 PM	BCl3 MFC set to  0.000000
7/29/2010	8:49:41 PM	PHl3 MFC set to  0.000000
7/29/2010	8:49:41 PM	SiCl4 MFC set to  0.000000
7/29/2010	8:49:41 PM	Bypass solenoid MFC set to  0.000000
7/29/2010	8:49:41 PM	Tube furnace set to 0
7/29/2010	8:50:41 PM	H2 valve closed
7/29/2010	8:50:41 PM	BCl3 valve closed
7/29/2010	8:50:41 PM	PH3 valve closed
7/29/2010	8:50:41 PM	SiCl4 pre valve closed
7/29/2010	8:50:41 PM	SiCl4 post valve closed
7/29/2010	8:50:41 PM	Bubbler valve closed
7/29/2010	8:50:41 PM	Helium valve opened
7/29/2010	8:50:41 PM	Main Vac valve opened
7/29/2010	8:50:41 PM	Bypass valve opened
7/29/2010	8:50:41 PM	Helium MFC set to  100.000000
7/29/2010	8:50:41 PM	H2 MFC set to  0.000000
7/29/2010	8:50:41 PM	BCl3 MFC set to  0.000000
7/29/2010	8:50:41 PM	PHl3 MFC set to  0.000000
7/29/2010	8:50:41 PM	SiCl4 MFC set to  0.000000
7/29/2010	8:50:41 PM	Bypass solenoid MFC set to  0.000000
7/29/2010	8:50:41 PM	Tube furnace set to 0
7/29/2010	8:59:41 PM	Helium valve closed
7/29/2010	8:59:41 PM	H2 valve closed
7/29/2010	8:59:41 PM	BCl3 valve closed
7/29/2010	8:59:41 PM	PH3 valve closed
7/29/2010	8:59:41 PM	SiCl4 pre valve closed
7/29/2010	8:59:41 PM	SiCl4 post valve closed
7/29/2010	8:59:41 PM	Bubbler valve closed
7/29/2010	8:59:41 PM	Main Vac valve opened
7/29/2010	8:59:41 PM	Bypass valve opened
7/29/2010	8:59:41 PM	Helium MFC set to  0.000000
7/29/2010	8:59:41 PM	H2 MFC set to  0.000000
7/29/2010	8:59:41 PM	BCl3 MFC set to  0.000000
7/29/2010	8:59:41 PM	PHl3 MFC set to  0.000000
7/29/2010	8:59:41 PM	SiCl4 MFC set to  0.000000
7/29/2010	8:59:41 PM	Bypass solenoid MFC set to  0.000000
7/29/2010	8:59:41 PM	Tube furnace set to 0
7/29/2010	8:59:42 PM	Run finished at 8:59 PM
7/29/2010	8:59:42 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
7/29/2010	9:34:52 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/29/2010	9:34:53 PM	Recipe started at 9:34 PM
7/29/2010	9:34:53 PM	Helium valve closed
7/29/2010	9:34:53 PM	H2 valve closed
7/29/2010	9:34:53 PM	BCl3 valve closed
7/29/2010	9:34:53 PM	PH3 valve closed
7/29/2010	9:34:53 PM	SiCl4 pre valve closed
7/29/2010	9:34:53 PM	SiCl4 post valve closed
7/29/2010	9:34:53 PM	Main Vac valve closed
7/29/2010	9:34:53 PM	Bubbler valve closed
7/29/2010	9:34:53 PM	Bypass valve opened
7/29/2010	9:34:53 PM	Helium MFC set to  0.000000
7/29/2010	9:34:53 PM	H2 MFC set to  0.000000
7/29/2010	9:34:53 PM	BCl3 MFC set to  0.000000
7/29/2010	9:34:53 PM	PHl3 MFC set to  0.000000
7/29/2010	9:34:53 PM	SiCl4 MFC set to  0.000000
7/29/2010	9:34:53 PM	Bypass solenoid MFC set to  0.000000
7/29/2010	9:34:53 PM	Tube furnace set to 0
7/29/2010	9:34:53 PM	Helium valve closed
7/29/2010	9:34:53 PM	H2 valve closed
7/29/2010	9:34:53 PM	BCl3 valve closed
7/29/2010	9:34:53 PM	PH3 valve closed
7/29/2010	9:34:53 PM	SiCl4 pre valve closed
7/29/2010	9:34:53 PM	SiCl4 post valve closed
7/29/2010	9:34:53 PM	Bubbler valve closed
7/29/2010	9:34:53 PM	Main Vac valve opened
7/29/2010	9:34:53 PM	Bypass valve opened
7/29/2010	9:34:53 PM	Helium MFC set to  0.000000
7/29/2010	9:34:53 PM	H2 MFC set to  0.000000
7/29/2010	9:34:53 PM	BCl3 MFC set to  0.000000
7/29/2010	9:34:53 PM	PHl3 MFC set to  0.000000
7/29/2010	9:34:53 PM	SiCl4 MFC set to  0.000000
7/29/2010	9:34:53 PM	Bypass solenoid MFC set to  0.000000
7/29/2010	9:34:53 PM	Tube furnace set to 0
7/29/2010	9:34:54 PM	Run finished at 9:34 PM
7/29/2010	9:34:54 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/29/2010	9:35:16 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
7/29/2010	9:35:19 PM	Recipe started at 9:35 PM
7/29/2010	9:35:19 PM	Helium valve closed
7/29/2010	9:35:19 PM	H2 valve closed
7/29/2010	9:35:19 PM	BCl3 valve closed
7/29/2010	9:35:19 PM	PH3 valve closed
7/29/2010	9:35:19 PM	SiCl4 pre valve closed
7/29/2010	9:35:19 PM	SiCl4 post valve closed
7/29/2010	9:35:19 PM	Main Vac valve closed
7/29/2010	9:35:19 PM	Bubbler valve closed
7/29/2010	9:35:19 PM	Bypass valve opened
7/29/2010	9:35:19 PM	Helium MFC set to  0.000000
7/29/2010	9:35:19 PM	H2 MFC set to  0.000000
7/29/2010	9:35:19 PM	BCl3 MFC set to  0.000000
7/29/2010	9:35:19 PM	PHl3 MFC set to  0.000000
7/29/2010	9:35:19 PM	SiCl4 MFC set to  0.000000
7/29/2010	9:35:19 PM	Bypass solenoid MFC set to  0.000000
7/29/2010	9:35:19 PM	Tube furnace set to 0
7/29/2010	9:35:20 PM	Helium valve closed
7/29/2010	9:35:20 PM	H2 valve closed
7/29/2010	9:35:20 PM	BCl3 valve closed
7/29/2010	9:35:20 PM	PH3 valve closed
7/29/2010	9:35:20 PM	SiCl4 pre valve closed
7/29/2010	9:35:20 PM	SiCl4 post valve closed
7/29/2010	9:35:20 PM	Bubbler valve closed
7/29/2010	9:35:20 PM	Main Vac valve opened
7/29/2010	9:35:20 PM	Bypass valve opened
7/29/2010	9:35:20 PM	Helium MFC set to  0.000000
7/29/2010	9:35:20 PM	H2 MFC set to  0.000000
7/29/2010	9:35:20 PM	BCl3 MFC set to  0.000000
7/29/2010	9:35:20 PM	PHl3 MFC set to  0.000000
7/29/2010	9:35:20 PM	SiCl4 MFC set to  0.000000
7/29/2010	9:35:20 PM	Bypass solenoid MFC set to  0.000000
7/29/2010	9:35:20 PM	Tube furnace set to 0
7/29/2010	9:36:20 PM	H2 valve closed
7/29/2010	9:36:20 PM	BCl3 valve closed
7/29/2010	9:36:20 PM	PH3 valve closed
7/29/2010	9:36:20 PM	SiCl4 pre valve closed
7/29/2010	9:36:20 PM	SiCl4 post valve closed
7/29/2010	9:36:20 PM	Bubbler valve closed
7/29/2010	9:36:20 PM	Helium valve opened
7/29/2010	9:36:20 PM	Main Vac valve opened
7/29/2010	9:36:20 PM	Bypass valve opened
7/29/2010	9:36:20 PM	Helium MFC set to  100.000000
7/29/2010	9:36:20 PM	H2 MFC set to  0.000000
7/29/2010	9:36:20 PM	BCl3 MFC set to  0.000000
7/29/2010	9:36:20 PM	PHl3 MFC set to  0.000000
7/29/2010	9:36:20 PM	SiCl4 MFC set to  0.000000
7/29/2010	9:36:20 PM	Bypass solenoid MFC set to  0.000000
7/29/2010	9:36:20 PM	Tube furnace set to 0
7/29/2010	9:45:20 PM	Helium valve closed
7/29/2010	9:45:20 PM	H2 valve closed
7/29/2010	9:45:20 PM	BCl3 valve closed
7/29/2010	9:45:20 PM	PH3 valve closed
7/29/2010	9:45:20 PM	SiCl4 pre valve closed
7/29/2010	9:45:20 PM	SiCl4 post valve closed
7/29/2010	9:45:20 PM	Bubbler valve closed
7/29/2010	9:45:20 PM	Main Vac valve opened
7/29/2010	9:45:20 PM	Bypass valve opened
7/29/2010	9:45:20 PM	Helium MFC set to  0.000000
7/29/2010	9:45:20 PM	H2 MFC set to  0.000000
7/29/2010	9:45:20 PM	BCl3 MFC set to  0.000000
7/29/2010	9:45:20 PM	PHl3 MFC set to  0.000000
7/29/2010	9:45:20 PM	SiCl4 MFC set to  0.000000
7/29/2010	9:45:20 PM	Bypass solenoid MFC set to  0.000000
7/29/2010	9:45:20 PM	Tube furnace set to 0
7/29/2010	9:46:20 PM	H2 valve closed
7/29/2010	9:46:20 PM	BCl3 valve closed
7/29/2010	9:46:20 PM	PH3 valve closed
7/29/2010	9:46:20 PM	SiCl4 pre valve closed
7/29/2010	9:46:20 PM	SiCl4 post valve closed
7/29/2010	9:46:20 PM	Bubbler valve closed
7/29/2010	9:46:20 PM	Helium valve opened
7/29/2010	9:46:20 PM	Main Vac valve opened
7/29/2010	9:46:20 PM	Bypass valve opened
7/29/2010	9:46:20 PM	Helium MFC set to  100.000000
7/29/2010	9:46:20 PM	H2 MFC set to  0.000000
7/29/2010	9:46:20 PM	BCl3 MFC set to  0.000000
7/29/2010	9:46:20 PM	PHl3 MFC set to  0.000000
7/29/2010	9:46:20 PM	SiCl4 MFC set to  0.000000
7/29/2010	9:46:20 PM	Bypass solenoid MFC set to  0.000000
7/29/2010	9:46:20 PM	Tube furnace set to 0
7/29/2010	9:55:20 PM	Helium valve closed
7/29/2010	9:55:20 PM	H2 valve closed
7/29/2010	9:55:20 PM	BCl3 valve closed
7/29/2010	9:55:20 PM	PH3 valve closed
7/29/2010	9:55:20 PM	SiCl4 pre valve closed
7/29/2010	9:55:20 PM	SiCl4 post valve closed
7/29/2010	9:55:20 PM	Bubbler valve closed
7/29/2010	9:55:20 PM	Main Vac valve opened
7/29/2010	9:55:20 PM	Bypass valve opened
7/29/2010	9:55:20 PM	Helium MFC set to  0.000000
7/29/2010	9:55:20 PM	H2 MFC set to  0.000000
7/29/2010	9:55:20 PM	BCl3 MFC set to  0.000000
7/29/2010	9:55:20 PM	PHl3 MFC set to  0.000000
7/29/2010	9:55:20 PM	SiCl4 MFC set to  0.000000
7/29/2010	9:55:20 PM	Bypass solenoid MFC set to  0.000000
7/29/2010	9:55:20 PM	Tube furnace set to 0
7/29/2010	9:56:20 PM	H2 valve closed
7/29/2010	9:56:21 PM	BCl3 valve closed
7/29/2010	9:56:21 PM	PH3 valve closed
7/29/2010	9:56:21 PM	SiCl4 pre valve closed
7/29/2010	9:56:21 PM	SiCl4 post valve closed
7/29/2010	9:56:21 PM	Bubbler valve closed
7/29/2010	9:56:21 PM	Helium valve opened
7/29/2010	9:56:21 PM	Main Vac valve opened
7/29/2010	9:56:21 PM	Bypass valve opened
7/29/2010	9:56:21 PM	Helium MFC set to  100.000000
7/29/2010	9:56:21 PM	H2 MFC set to  0.000000
7/29/2010	9:56:21 PM	BCl3 MFC set to  0.000000
7/29/2010	9:56:21 PM	PHl3 MFC set to  0.000000
7/29/2010	9:56:21 PM	SiCl4 MFC set to  0.000000
7/29/2010	9:56:21 PM	Bypass solenoid MFC set to  0.000000
7/29/2010	9:56:21 PM	Tube furnace set to 0
7/29/2010	10:05:21 PM	Helium valve closed
7/29/2010	10:05:21 PM	H2 valve closed
7/29/2010	10:05:21 PM	BCl3 valve closed
7/29/2010	10:05:21 PM	PH3 valve closed
7/29/2010	10:05:21 PM	SiCl4 pre valve closed
7/29/2010	10:05:21 PM	SiCl4 post valve closed
7/29/2010	10:05:21 PM	Bubbler valve closed
7/29/2010	10:05:21 PM	Main Vac valve opened
7/29/2010	10:05:21 PM	Bypass valve opened
7/29/2010	10:05:21 PM	Helium MFC set to  0.000000
7/29/2010	10:05:21 PM	H2 MFC set to  0.000000
7/29/2010	10:05:21 PM	BCl3 MFC set to  0.000000
7/29/2010	10:05:21 PM	PHl3 MFC set to  0.000000
7/29/2010	10:05:21 PM	SiCl4 MFC set to  0.000000
7/29/2010	10:05:21 PM	Bypass solenoid MFC set to  0.000000
7/29/2010	10:05:21 PM	Tube furnace set to 0
7/29/2010	10:05:22 PM	Run finished at 10:05 PM
7/29/2010	10:05:22 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
7/29/2010	10:25:29 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
7/29/2010	10:25:32 PM	Recipe started at 10:25 PM
7/29/2010	10:25:32 PM	Helium valve closed
7/29/2010	10:25:32 PM	H2 valve closed
7/29/2010	10:25:32 PM	BCl3 valve closed
7/29/2010	10:25:32 PM	PH3 valve closed
7/29/2010	10:25:32 PM	SiCl4 pre valve closed
7/29/2010	10:25:32 PM	SiCl4 post valve closed
7/29/2010	10:25:32 PM	Main Vac valve closed
7/29/2010	10:25:32 PM	Bubbler valve closed
7/29/2010	10:25:32 PM	Bypass valve opened
7/29/2010	10:25:32 PM	Helium MFC set to  0.000000
7/29/2010	10:25:32 PM	H2 MFC set to  0.000000
7/29/2010	10:25:32 PM	BCl3 MFC set to  0.000000
7/29/2010	10:25:32 PM	PHl3 MFC set to  0.000000
7/29/2010	10:25:32 PM	SiCl4 MFC set to  0.000000
7/29/2010	10:25:32 PM	Bypass solenoid MFC set to  0.000000
7/29/2010	10:25:32 PM	Tube furnace set to 0
7/29/2010	10:25:32 PM	Helium valve closed
7/29/2010	10:25:32 PM	H2 valve closed
7/29/2010	10:25:32 PM	BCl3 valve closed
7/29/2010	10:25:32 PM	PH3 valve closed
7/29/2010	10:25:32 PM	SiCl4 pre valve closed
7/29/2010	10:25:32 PM	SiCl4 post valve closed
7/29/2010	10:25:32 PM	Bubbler valve closed
7/29/2010	10:25:32 PM	Main Vac valve opened
7/29/2010	10:25:32 PM	Bypass valve opened
7/29/2010	10:25:32 PM	Helium MFC set to  0.000000
7/29/2010	10:25:32 PM	H2 MFC set to  0.000000
7/29/2010	10:25:32 PM	BCl3 MFC set to  0.000000
7/29/2010	10:25:32 PM	PHl3 MFC set to  0.000000
7/29/2010	10:25:32 PM	SiCl4 MFC set to  0.000000
7/29/2010	10:25:32 PM	Bypass solenoid MFC set to  0.000000
7/29/2010	10:25:32 PM	Tube furnace set to 0
7/29/2010	10:26:32 PM	H2 valve closed
7/29/2010	10:26:32 PM	BCl3 valve closed
7/29/2010	10:26:32 PM	PH3 valve closed
7/29/2010	10:26:32 PM	SiCl4 pre valve closed
7/29/2010	10:26:32 PM	SiCl4 post valve closed
7/29/2010	10:26:32 PM	Bubbler valve closed
7/29/2010	10:26:32 PM	Helium valve opened
7/29/2010	10:26:32 PM	Main Vac valve opened
7/29/2010	10:26:32 PM	Bypass valve opened
7/29/2010	10:26:32 PM	Helium MFC set to  100.000000
7/29/2010	10:26:32 PM	H2 MFC set to  0.000000
7/29/2010	10:26:32 PM	BCl3 MFC set to  0.000000
7/29/2010	10:26:32 PM	PHl3 MFC set to  0.000000
7/29/2010	10:26:32 PM	SiCl4 MFC set to  0.000000
7/29/2010	10:26:32 PM	Bypass solenoid MFC set to  0.000000
7/29/2010	10:26:32 PM	Tube furnace set to 0
7/29/2010	10:35:32 PM	Helium valve closed
7/29/2010	10:35:32 PM	H2 valve closed
7/29/2010	10:35:32 PM	BCl3 valve closed
7/29/2010	10:35:32 PM	PH3 valve closed
7/29/2010	10:35:32 PM	SiCl4 pre valve closed
7/29/2010	10:35:32 PM	SiCl4 post valve closed
7/29/2010	10:35:32 PM	Bubbler valve closed
7/29/2010	10:35:32 PM	Main Vac valve opened
7/29/2010	10:35:32 PM	Bypass valve opened
7/29/2010	10:35:32 PM	Helium MFC set to  0.000000
7/29/2010	10:35:32 PM	H2 MFC set to  0.000000
7/29/2010	10:35:32 PM	BCl3 MFC set to  0.000000
7/29/2010	10:35:32 PM	PHl3 MFC set to  0.000000
7/29/2010	10:35:32 PM	SiCl4 MFC set to  0.000000
7/29/2010	10:35:32 PM	Bypass solenoid MFC set to  0.000000
7/29/2010	10:35:33 PM	Tube furnace set to 0
7/29/2010	10:36:33 PM	H2 valve closed
7/29/2010	10:36:33 PM	BCl3 valve closed
7/29/2010	10:36:33 PM	PH3 valve closed
7/29/2010	10:36:33 PM	SiCl4 pre valve closed
7/29/2010	10:36:33 PM	SiCl4 post valve closed
7/29/2010	10:36:33 PM	Bubbler valve closed
7/29/2010	10:36:33 PM	Helium valve opened
7/29/2010	10:36:33 PM	Main Vac valve opened
7/29/2010	10:36:33 PM	Bypass valve opened
7/29/2010	10:36:33 PM	Helium MFC set to  100.000000
7/29/2010	10:36:33 PM	H2 MFC set to  0.000000
7/29/2010	10:36:33 PM	BCl3 MFC set to  0.000000
7/29/2010	10:36:33 PM	PHl3 MFC set to  0.000000
7/29/2010	10:36:33 PM	SiCl4 MFC set to  0.000000
7/29/2010	10:36:33 PM	Bypass solenoid MFC set to  0.000000
7/29/2010	10:36:33 PM	Tube furnace set to 0
7/29/2010	10:45:33 PM	Helium valve closed
7/29/2010	10:45:33 PM	H2 valve closed
7/29/2010	10:45:33 PM	BCl3 valve closed
7/29/2010	10:45:33 PM	PH3 valve closed
7/29/2010	10:45:33 PM	SiCl4 pre valve closed
7/29/2010	10:45:33 PM	SiCl4 post valve closed
7/29/2010	10:45:33 PM	Bubbler valve closed
7/29/2010	10:45:33 PM	Main Vac valve opened
7/29/2010	10:45:33 PM	Bypass valve opened
7/29/2010	10:45:33 PM	Helium MFC set to  0.000000
7/29/2010	10:45:33 PM	H2 MFC set to  0.000000
7/29/2010	10:45:33 PM	BCl3 MFC set to  0.000000
7/29/2010	10:45:33 PM	PHl3 MFC set to  0.000000
7/29/2010	10:45:33 PM	SiCl4 MFC set to  0.000000
7/29/2010	10:45:33 PM	Bypass solenoid MFC set to  0.000000
7/29/2010	10:45:33 PM	Tube furnace set to 0
7/29/2010	10:46:33 PM	H2 valve closed
7/29/2010	10:46:33 PM	BCl3 valve closed
7/29/2010	10:46:33 PM	PH3 valve closed
7/29/2010	10:46:33 PM	SiCl4 pre valve closed
7/29/2010	10:46:33 PM	SiCl4 post valve closed
7/29/2010	10:46:33 PM	Bubbler valve closed
7/29/2010	10:46:33 PM	Helium valve opened
7/29/2010	10:46:33 PM	Main Vac valve opened
7/29/2010	10:46:33 PM	Bypass valve opened
7/29/2010	10:46:33 PM	Helium MFC set to  100.000000
7/29/2010	10:46:33 PM	H2 MFC set to  0.000000
7/29/2010	10:46:33 PM	BCl3 MFC set to  0.000000
7/29/2010	10:46:33 PM	PHl3 MFC set to  0.000000
7/29/2010	10:46:33 PM	SiCl4 MFC set to  0.000000
7/29/2010	10:46:33 PM	Bypass solenoid MFC set to  0.000000
7/29/2010	10:46:33 PM	Tube furnace set to 0
7/29/2010	10:55:33 PM	Helium valve closed
7/29/2010	10:55:33 PM	H2 valve closed
7/29/2010	10:55:33 PM	BCl3 valve closed
7/29/2010	10:55:33 PM	PH3 valve closed
7/29/2010	10:55:33 PM	SiCl4 pre valve closed
7/29/2010	10:55:33 PM	SiCl4 post valve closed
7/29/2010	10:55:33 PM	Bubbler valve closed
7/29/2010	10:55:33 PM	Main Vac valve opened
7/29/2010	10:55:33 PM	Bypass valve opened
7/29/2010	10:55:33 PM	Helium MFC set to  0.000000
7/29/2010	10:55:33 PM	H2 MFC set to  0.000000
7/29/2010	10:55:33 PM	BCl3 MFC set to  0.000000
7/29/2010	10:55:33 PM	PHl3 MFC set to  0.000000
7/29/2010	10:55:33 PM	SiCl4 MFC set to  0.000000
7/29/2010	10:55:33 PM	Bypass solenoid MFC set to  0.000000
7/29/2010	10:55:33 PM	Tube furnace set to 0
7/29/2010	10:55:34 PM	Run finished at 10:55 PM
7/29/2010	10:55:34 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
7/29/2010	10:56:23 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
7/29/2010	10:56:26 PM	Recipe started at 10:56 PM
7/29/2010	10:56:26 PM	Helium valve closed
7/29/2010	10:56:26 PM	H2 valve closed
7/29/2010	10:56:26 PM	BCl3 valve closed
7/29/2010	10:56:26 PM	PH3 valve closed
7/29/2010	10:56:26 PM	SiCl4 pre valve closed
7/29/2010	10:56:26 PM	SiCl4 post valve closed
7/29/2010	10:56:26 PM	Main Vac valve closed
7/29/2010	10:56:26 PM	Bubbler valve closed
7/29/2010	10:56:26 PM	Bypass valve opened
7/29/2010	10:56:26 PM	Helium MFC set to  0.000000
7/29/2010	10:56:26 PM	H2 MFC set to  0.000000
7/29/2010	10:56:26 PM	BCl3 MFC set to  0.000000
7/29/2010	10:56:26 PM	PHl3 MFC set to  0.000000
7/29/2010	10:56:26 PM	SiCl4 MFC set to  0.000000
7/29/2010	10:56:26 PM	Bypass solenoid MFC set to  0.000000
7/29/2010	10:56:26 PM	Tube furnace set to 0
7/29/2010	10:56:26 PM	Helium valve closed
7/29/2010	10:56:26 PM	H2 valve closed
7/29/2010	10:56:26 PM	BCl3 valve closed
7/29/2010	10:56:26 PM	PH3 valve closed
7/29/2010	10:56:26 PM	SiCl4 pre valve closed
7/29/2010	10:56:26 PM	SiCl4 post valve closed
7/29/2010	10:56:26 PM	Bubbler valve closed
7/29/2010	10:56:26 PM	Main Vac valve opened
7/29/2010	10:56:26 PM	Bypass valve opened
7/29/2010	10:56:26 PM	Helium MFC set to  0.000000
7/29/2010	10:56:26 PM	H2 MFC set to  0.000000
7/29/2010	10:56:26 PM	BCl3 MFC set to  0.000000
7/29/2010	10:56:26 PM	PHl3 MFC set to  0.000000
7/29/2010	10:56:26 PM	SiCl4 MFC set to  0.000000
7/29/2010	10:56:26 PM	Bypass solenoid MFC set to  0.000000
7/29/2010	10:56:26 PM	Tube furnace set to 0
7/29/2010	10:57:26 PM	H2 valve closed
7/29/2010	10:57:26 PM	BCl3 valve closed
7/29/2010	10:57:26 PM	PH3 valve closed
7/29/2010	10:57:26 PM	SiCl4 pre valve closed
7/29/2010	10:57:26 PM	SiCl4 post valve closed
7/29/2010	10:57:26 PM	Bubbler valve closed
7/29/2010	10:57:26 PM	Helium valve opened
7/29/2010	10:57:26 PM	Main Vac valve opened
7/29/2010	10:57:26 PM	Bypass valve opened
7/29/2010	10:57:26 PM	Helium MFC set to  100.000000
7/29/2010	10:57:26 PM	H2 MFC set to  0.000000
7/29/2010	10:57:26 PM	BCl3 MFC set to  0.000000
7/29/2010	10:57:26 PM	PHl3 MFC set to  0.000000
7/29/2010	10:57:26 PM	SiCl4 MFC set to  0.000000
7/29/2010	10:57:26 PM	Bypass solenoid MFC set to  0.000000
7/29/2010	10:57:27 PM	Tube furnace set to 0
7/29/2010	11:06:27 PM	Helium valve closed
7/29/2010	11:06:27 PM	H2 valve closed
7/29/2010	11:06:27 PM	BCl3 valve closed
7/29/2010	11:06:27 PM	PH3 valve closed
7/29/2010	11:06:27 PM	SiCl4 pre valve closed
7/29/2010	11:06:27 PM	SiCl4 post valve closed
7/29/2010	11:06:27 PM	Bubbler valve closed
7/29/2010	11:06:27 PM	Main Vac valve opened
7/29/2010	11:06:27 PM	Bypass valve opened
7/29/2010	11:06:27 PM	Helium MFC set to  0.000000
7/29/2010	11:06:27 PM	H2 MFC set to  0.000000
7/29/2010	11:06:27 PM	BCl3 MFC set to  0.000000
7/29/2010	11:06:27 PM	PHl3 MFC set to  0.000000
7/29/2010	11:06:27 PM	SiCl4 MFC set to  0.000000
7/29/2010	11:06:27 PM	Bypass solenoid MFC set to  0.000000
7/29/2010	11:06:27 PM	Tube furnace set to 0
7/29/2010	11:07:27 PM	H2 valve closed
7/29/2010	11:07:27 PM	BCl3 valve closed
7/29/2010	11:07:27 PM	PH3 valve closed
7/29/2010	11:07:27 PM	SiCl4 pre valve closed
7/29/2010	11:07:27 PM	SiCl4 post valve closed
7/29/2010	11:07:27 PM	Bubbler valve closed
7/29/2010	11:07:27 PM	Helium valve opened
7/29/2010	11:07:27 PM	Main Vac valve opened
7/29/2010	11:07:27 PM	Bypass valve opened
7/29/2010	11:07:27 PM	Helium MFC set to  100.000000
7/29/2010	11:07:27 PM	H2 MFC set to  0.000000
7/29/2010	11:07:27 PM	BCl3 MFC set to  0.000000
7/29/2010	11:07:27 PM	PHl3 MFC set to  0.000000
7/29/2010	11:07:27 PM	SiCl4 MFC set to  0.000000
7/29/2010	11:07:27 PM	Bypass solenoid MFC set to  0.000000
7/29/2010	11:07:27 PM	Tube furnace set to 0
7/29/2010	11:16:27 PM	Helium valve closed
7/29/2010	11:16:27 PM	H2 valve closed
7/29/2010	11:16:27 PM	BCl3 valve closed
7/29/2010	11:16:27 PM	PH3 valve closed
7/29/2010	11:16:27 PM	SiCl4 pre valve closed
7/29/2010	11:16:27 PM	SiCl4 post valve closed
7/29/2010	11:16:27 PM	Bubbler valve closed
7/29/2010	11:16:27 PM	Main Vac valve opened
7/29/2010	11:16:27 PM	Bypass valve opened
7/29/2010	11:16:27 PM	Helium MFC set to  0.000000
7/29/2010	11:16:27 PM	H2 MFC set to  0.000000
7/29/2010	11:16:27 PM	BCl3 MFC set to  0.000000
7/29/2010	11:16:27 PM	PHl3 MFC set to  0.000000
7/29/2010	11:16:27 PM	SiCl4 MFC set to  0.000000
7/29/2010	11:16:27 PM	Bypass solenoid MFC set to  0.000000
7/29/2010	11:16:27 PM	Tube furnace set to 0
7/29/2010	11:17:27 PM	H2 valve closed
7/29/2010	11:17:27 PM	BCl3 valve closed
7/29/2010	11:17:27 PM	PH3 valve closed
7/29/2010	11:17:27 PM	SiCl4 pre valve closed
7/29/2010	11:17:27 PM	SiCl4 post valve closed
7/29/2010	11:17:27 PM	Bubbler valve closed
7/29/2010	11:17:27 PM	Helium valve opened
7/29/2010	11:17:27 PM	Main Vac valve opened
7/29/2010	11:17:27 PM	Bypass valve opened
7/29/2010	11:17:27 PM	Helium MFC set to  100.000000
7/29/2010	11:17:27 PM	H2 MFC set to  0.000000
7/29/2010	11:17:27 PM	BCl3 MFC set to  0.000000
7/29/2010	11:17:27 PM	PHl3 MFC set to  0.000000
7/29/2010	11:17:27 PM	SiCl4 MFC set to  0.000000
7/29/2010	11:17:27 PM	Bypass solenoid MFC set to  0.000000
7/29/2010	11:17:27 PM	Tube furnace set to 0
7/29/2010	11:25:48 PM	Helium valve closed
7/29/2010	11:25:48 PM	H2 valve closed
7/29/2010	11:25:48 PM	BCl3 valve closed
7/29/2010	11:25:48 PM	PH3 valve closed
7/29/2010	11:25:48 PM	SiCl4 pre valve closed
7/29/2010	11:25:48 PM	SiCl4 post valve closed
7/29/2010	11:25:48 PM	Bubbler valve closed
7/29/2010	11:25:48 PM	Main Vac valve opened
7/29/2010	11:25:48 PM	Bypass valve opened
7/29/2010	11:25:48 PM	Helium MFC set to  0.000000
7/29/2010	11:25:48 PM	H2 MFC set to  0.000000
7/29/2010	11:25:48 PM	BCl3 MFC set to  0.000000
7/29/2010	11:25:48 PM	PHl3 MFC set to  0.000000
7/29/2010	11:25:48 PM	SiCl4 MFC set to  0.000000
7/29/2010	11:25:48 PM	Bypass solenoid MFC set to  0.000000
7/29/2010	11:25:48 PM	Tube furnace set to 0
7/29/2010	11:25:49 PM	Run finished at 11:25 PM
7/29/2010	11:25:49 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
7/29/2010	11:26:48 PM	Recipe started at 11:26 PM
7/29/2010	11:26:48 PM	Helium valve closed
7/29/2010	11:26:48 PM	BCl3 valve closed
7/29/2010	11:26:48 PM	PH3 valve closed
7/29/2010	11:26:48 PM	SiCl4 pre valve closed
7/29/2010	11:26:48 PM	SiCl4 post valve closed
7/29/2010	11:26:48 PM	Main Vac valve closed
7/29/2010	11:26:48 PM	Bypass valve closed
7/29/2010	11:26:48 PM	Bubbler valve closed
7/29/2010	11:26:48 PM	H2 valve opened
7/29/2010	11:26:48 PM	Helium MFC set to  0.000000
7/29/2010	11:26:48 PM	H2 MFC set to  500.000000
7/29/2010	11:26:48 PM	BCl3 MFC set to  0.000000
7/29/2010	11:26:48 PM	PHl3 MFC set to  0.000000
7/29/2010	11:26:48 PM	SiCl4 MFC set to  0.000000
7/29/2010	11:26:48 PM	Bypass solenoid MFC set to  0.000000
7/29/2010	11:26:48 PM	Tube furnace set to 1000
7/29/2010	11:28:06 PM	Helium valve closed
7/29/2010	11:28:06 PM	BCl3 valve closed
7/29/2010	11:28:06 PM	PH3 valve closed
7/29/2010	11:28:06 PM	SiCl4 pre valve closed
7/29/2010	11:28:06 PM	SiCl4 post valve closed
7/29/2010	11:28:06 PM	Main Vac valve closed
7/29/2010	11:28:06 PM	Bypass valve closed
7/29/2010	11:28:06 PM	H2 valve opened
7/29/2010	11:28:06 PM	Bubbler valve opened
7/29/2010	11:28:06 PM	Helium MFC set to  0.000000
7/29/2010	11:28:06 PM	H2 MFC set to  500.000000
7/29/2010	11:28:06 PM	BCl3 MFC set to  0.000000
7/29/2010	11:28:06 PM	PHl3 MFC set to  0.000000
7/29/2010	11:28:06 PM	SiCl4 MFC set to  0.000000
7/29/2010	11:28:06 PM	Bypass solenoid MFC set to  0.000000
7/29/2010	11:28:06 PM	Tube furnace set to 1000
7/29/2010	11:48:06 PM	Helium valve closed
7/29/2010	11:48:06 PM	PH3 valve closed
7/29/2010	11:48:06 PM	Main Vac valve closed
7/29/2010	11:48:06 PM	Bypass valve closed
7/29/2010	11:48:06 PM	H2 valve opened
7/29/2010	11:48:06 PM	BCl3 valve opened
7/29/2010	11:48:06 PM	SiCl4 pre valve opened
7/29/2010	11:48:06 PM	SiCl4 post valve opened
7/29/2010	11:48:06 PM	Bubbler valve opened
7/29/2010	11:48:06 PM	Helium MFC set to  0.000000
7/29/2010	11:48:06 PM	H2 MFC set to  500.000000
7/29/2010	11:48:06 PM	BCl3 MFC set to  35.000000
7/29/2010	11:48:06 PM	PHl3 MFC set to  0.000000
7/29/2010	11:48:06 PM	SiCl4 MFC set to  50.000000
7/29/2010	11:48:06 PM	Bypass solenoid MFC set to  0.000000
7/29/2010	11:48:07 PM	Tube furnace set to 1000
7/29/2010	11:53:07 PM	Helium valve closed
7/29/2010	11:53:07 PM	BCl3 valve closed
7/29/2010	11:53:07 PM	PH3 valve closed
7/29/2010	11:53:07 PM	SiCl4 pre valve closed
7/29/2010	11:53:07 PM	SiCl4 post valve closed
7/29/2010	11:53:07 PM	Main Vac valve closed
7/29/2010	11:53:07 PM	Bypass valve closed
7/29/2010	11:53:07 PM	H2 valve opened
7/29/2010	11:53:07 PM	Bubbler valve opened
7/29/2010	11:53:07 PM	Helium MFC set to  0.000000
7/29/2010	11:53:07 PM	H2 MFC set to  500.000000
7/29/2010	11:53:07 PM	BCl3 MFC set to  0.000000
7/29/2010	11:53:07 PM	PHl3 MFC set to  0.000000
7/29/2010	11:53:07 PM	SiCl4 MFC set to  0.000000
7/29/2010	11:53:07 PM	Bypass solenoid MFC set to  0.000000
7/29/2010	11:53:07 PM	Tube furnace set to 750
